Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut

Basic Type/Direct Mount Type

7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

RB/RBL/RBQ

C J G5-S CV MVGQ CC Series Variations Series Basic type With cap or bumper (Option) Stopper nut (Option) Hexagon nut Page Foot bracket RB Series RB J 18-10-2 Series RB D-X Coolant resistant Series RBL 18-10-8 20(Except 08 type) Series RBQ Data 18-10-10 Series RBQ 2 Hexagon nuts are attached for Series RB and standard models RBQ. 10-18-1 2 Shock Absorber Series RB Specifications Model RB0805

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 V.

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r t . : . , t . : r r l ' r i . r t , : t r ' r r r , . a a . . r . r . , r r , , .

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Double acting 17-5-45 4 Series LVD Standard Specifications LVD40 LVD50 LVD20 LVD30 Model LVD10 Metric 10, 12 12, 19 4, 6 6, 8, 10 3, 4 Tubing O.D.

Stroke Reading Cylinder and Counter

With cushion on head end 05 Exension cable CE1-R Cable length 05 10 15 20 Suffix 5 m Nil Extension cable 10 m C Extension cable & connector 15 m 20 m Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

1.5 15.5 10 4 2.5 6 4 5 25.7 19 14 10 3 15.2 12 5 9.4 4 27.2 17 20.5 16.2 12 14 8 6 14 5 17 6.5 18 5.5 22 10 28.8 19 21.5 18.8 14 17 17 7.5 25 6.5 22 17 7 30 8 22 12 30.3 22 23.5 19.3 17 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation. 100

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

IDG

0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Soft Start-up Valve AV2000/3000/4000/5000 1

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.

Series AS-FM/AS-M/ASD-FM

1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 With One-touch fitting For low speed control Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32UNF) R NPT M5 x 0.8 10-32UNF 1/8 1/4 N Needle Valve/Flow Rate Characteristics ASD230FM ASD330FM ASD430FM 0.8 Upstream pressure 0.5MPa Upstream pressure 0.5MPa Upstream pressure 0.5MPa 50 10 20 0.15 0.3 Flow rate l/min (ANR

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

ALD Number of distribution ports 6 6 ALB Oil distributor (VA) (VB) Distribution 4 6 8 4 6 10 16 4 port 6 port 8 port 4 port 6 port 10 port 16 port VB6-6 LMU A B Both sides exhaust One side exhaust VA4-6 ALIP Dimensions AEP HEP VA -6 VB -6 2 x 6.5 R 1/8 4 x 6.5 hole Applicable tubing O.D. 6, I.D. 4 R 1/8 Applicable tubing O.D. 6, I.D. 4 R 1/8 R 1/8 Model Number of distribution ports Applicable

S070

SS070M013A Replacement Parts Description No. e r Part no. Material Number Gasket 10 SS070M-80A-1 FKM Clip 10 SS070M-80A-2 Stainless steel 4-11-16 17 Series S070 Specific Product Precautions 1 Be sure to read before handling. Valve Mounting/Removal Screwing in M5/M3 Thread Caution Caution 1.

IDX-OM-U010

Do not modify the internal electrical wiring of the product. 10.2 Earth leakage breaker specification Models Item IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R Rated current (A) 10 15 20 30 Sensitivity current (mA) 30 IDFC60/70/80/90 Series 10.1 Safety instructions for use 10-1 IDX-OM-U010 Chapter 10 Option R 10.3 Connection of power supply Connect the power cable according to the procedure

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Replacement Actuator (Cylinder) CY1F R B 10 Stroke Cylinder identification symbol Piping direction R L Centralized piping on right Centralized piping on left Thread type Bore size (mm) Symbol Thread type M Rc NPT G Bore size (mm) 10, 15 10 15 25 10 15 25 Nil 25 TN TF 8-16-14 14 Series CY1F Magnetically Coupled Rodless Cylinder Low Profile Guide Type Construction q @0 #3 #2 @4 #0 @6 @5 #4