Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A B Without auto switch With auto switch (All dimensions are common expect "A" and "B".)

Modular Type Air Filter Series AF

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification With auto drain Standard specification Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14

ZX

Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output

TABLE OF CONTENTS

SOL A SOL B SOL A SOL B CYL CYL EXH IN EXH IN SOLENOID B ENERGIZED SOLENOID A ENERGIZED SOLENOID A DE-ENERGIZED SOLENOID B DE-ENERGIZED NOTE: ALL PORTS OPEN WHEN BOTH SOLENOIDS ENERGIZED ALL PORTS CLOSED WHEN BOTH SOLENOIDS DE-ENERGIZED OPTIONS AVAILABLE: 3 WAY HI-PRESSURE VALVE HOUSING OPTIONS see page 78 COIL OPTIONS see page 79 MISCELLANEOUS OPTIONS see page 76 *STRAIN RELIEF CONNECTOR

AR Series Modular Type Regulator

Example) AR30-03BG-NR-A-X2068 AF-A AF-A Nq Body size 20 25 30 40 Symbol Description AR -A -B AL-A Nw Pipe thread type Nil Rc V V V V N NPT V V V V F G V V V V + AW -A -B AW 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + AG Ne Port size E AV a Mounting Nil Without mounting option V V V V B Note 2) With bracket V V V V H With set nut (for panel mount) Note 3) V V V V + Option Note

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

3 Way,3 Port Solenoid Valve NVZ Series

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

VXA21/22

How to Order VXA32 VXA31 4 Bracket Nil B None With bracket Stainless steel body model is supplied with bracket.

NVZseies

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

VP4

VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Microspeed Cylinder

B Through hole/ Double end tap common (standard) Number of auto switches Bore size 12 16 20 25 2 pcs. 1 pc.

Digital Flow Switches

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

3 Port Solenoid Valve

2 3 Port size Symbol Nil M3 M5 Sub-plate Without sub-plate With sub-plate S070 B 5 B G Base Mounted S070 C 5 B G 32 Body Ported Body type Body type Body ported Symbol C Port size Symbol 32 Connection Barb fitting Applicable tubing 3.18/2 Coil voltage 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Electrical entry G Grommet C Plug lead with light/ surge voltage suppressor Power consumption Pressure

ZSE30/ISE30

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Elbow Straight A One-touch fitting size 4, 5/32" 6 1/4" C 18 20 20.5 B 10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital