Smooth Cylinder/Low Speed Cylinder

A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

One-touch Fittings

Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.

Fieldbus System

A B A B A B A A A B For the I/O Unit part number mounted, refer to the following pages.

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

Secondary Batteries

CE-certified Symbol EX124D-SDN1-X188 DeviceNet (Negative common) Q A, B port size (Inch) A, B port size (Metric) P, E port Applicable series P, E port Applicable series A, B port Symbol C4 C6 C8 M A, B port Symbol N3 N7 N9 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 A, B ports mixed One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

rep-filter-e

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

Industrial Filters Replacement Procedure

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

MNB

9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MQQ

3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

3

C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted

Solenoid: No.1 Solenoid, Body Size: 5 (20A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 04 [1/2 (20A)], Thread: N (NPT), Voltage: 6 (12VDC), Lead Wire: D (DIN Connector), Surge Suppressor: S (Surge Suppressor)

Solenoid: No.1 Solenoid, Body Option: 5 (20A), Style: 2 (Energized Closed/N.O.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: C (Conduit)

Solenoid: No.1 Solenoid, Body Option: 5 (20A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor)

Solenoid: No.1 Solenoid, Body Option: 5 (20A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: C (Conduit)

Fitting Type: E (Union Elbow), Size Combination-A Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A), Different Diameter-B Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A)

Fitting Type: T (Union Tee), Size Combination-A Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A), Different Diameter-B Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A)