2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L RUN SERIAL UNIT L ERR.

A

P O R T S PT Ports XC18 NPT Ports (25~40 Only) A L L O W A B L E M O M E N T A N D M A X I M U M A L L O W A B L E L O A D H O W T O O R D E R M Y 1 M R O D L E S S C Y L I N D E R MY1M G M O M E N T (N M) A L L O W A B L E L O A D (N) B O R E S I Z E 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm Local Production Available N O O F S W I T C H E S ...2 Pieces S ...1 Piece

3 Port Solenoid Valve Metal Seal Series VZ200 1

L plug connector, With lead wire LN: L plug connector, Without lead wire LO: L plug connector, Without connector 5 24 VDC 6 12 VDC 9 Other Option D: DIN terminal M: M plug connector, With lead wire MN: M plug connector, Without lead wire H: Grommet, Lead wire length 600 mm MO: M plug connector, Without connector DO: DIN terminal, Without connector Type G, L and M: Lead wire 300 mm 4-15-

Intrinsically Safe Valve

(LL) 53-SY5 20-LL-01 (-F2) 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 14.7 12 84.3 Terminal type (TT) 53-SY5 20-TT-01 (-F2) 3 4 5 Max. 10 L (Lead wire length) 189.6 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 101.1 7 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7120-L-02 (-F2) With

Secondary Batteries

with secondary batteries ZS-33-M-X221 90 Material restriction Mounting screw (accessory) Type Integrated display 7 R Rated flow range (Flow rate range) 10 50 11 * ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch

smcmaintenancepartslist

Long stroke CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS CDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 Seal kit includes @7, @8 and @9. Order the seal kit with the kit number. Since the seal kit does not include a grease pack, order it separately.

VQC

Elbow fitting assembly VVQ1000-F-L Port plug VVQ0-58A Electrical wiring specifications [-K] VVQC1000-19AD S 0 C3 C4 C6 M5 VQ5 C6 (SUP port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-sub connector 6 One-touch fitting Terminal no.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

modular-press-e

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

New

G 1F 48 VAC G H K L Z NPT 1G 1H 1V 1J 220 VAC 240 VAC DIN terminal ? ? ? ?

PSxx-OMM0006CN

-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-3 1000