Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

Digital Pressure Switch ( compatible)

(7-segments) Sub display: 4 digit (Upper 1 digit 11-segments, 7-segments for other) Operation light LED is ON when switch output is ON (OUT1, OUT2: Orange) Digital filter 4 Variable at 0 to 30 s/0.01 s step -89No.PS-OMV0006-D Product No.

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

PF-OMM0004_C

1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -66No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 210 g 260 g 410

LFE-OMY0008

0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

SI unit

Number of CH occupied by PLC Number of point occupied by one node address Setting range Max. number of connected slave IN1/OUT1 8 IN : 0 to 1 OUT : 0 to 1 IN 2 OUT 2 IN2/OUT2 8 IN : 0 to 3 OUT : 0 to 3 IN 4 OUT 4 IN4/OUT4 8 IN : 0 to 7 OUT : 0 to 7 IN 8 OUT 8 IN1/OUT1 4 IN : 0 to 3 OUT : 0 to 3 IN 4 OUT 4 IN2/OUT2 4 IN : 0 to 7 OUT : 0 to 7 IN 8 OUT 8 IN4/OUT4 4 IN : 0 to 15 OUT : 0 to 15

LFE-OMZ0011

0.5 s, 1 s, 2 s, 5 s Output protection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time *6*7 Linked with the switch output Analogue output Voltage output Output voltage: 1 to 5V Output impedance: 1k Current output Output current: 4 to 20 mA Max. load impedance: 600 Hysteresis

ISO Interface

(2.4x4.4x7.4) 1/4, 3/8, 1/2 1.8 2 VSS8-8 Metal 79x125.5x211 (3.1x4.9x8.3) 3/8, 1/2, 3/4 3.6 3 VSS8-10 Metal 96x137x246 (3.8x5.4x9.7) 1/2, 3/4, 1 5.0 Mounted Interface Valve How to order Valve VS R 86 FG S 1 A03T -V1 -X1 Type of seal Special Options R Rubber S Metal Standard X1 External Pilot Supply Size 6 Size 1 8 Size 2 10 Size 3 Pilot Exhaust Options Pilot Exh. through footprint V1 External

High-precision Digital Pressure Switch ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) System error (Er0, 4, 6, 7, 8, 9) is displayed. Check if there is a noise source nearby. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range 12 to 30 VDC.

High-precision Digital Pressure Switch

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) System error (Er0, 4, 6, 7, 8, 9) is displayed. Check if there is a noise source nearby. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range 12 to 30 VDC.

High-precision Digital Pressure Switch ( compatible)

Refer to Trouble No.6 -74No.PS-OMY0007-A The display is Refer to Trouble No.7 Displayed value is not unstable. correct Refer to Trouble No.8 The display turns OFF. Refer to Trouble No.8 The display is missing. Refer to Trouble No.9 Display flashes. There are differences in the displayed values Refer to Trouble No.10 when using more than one product.

PSxx-OMV0003CN

11 12 13 14 15 OUT1 16 OUT2 17 NPN/PNP 18 Line 19 OFF() () -70No.PS-OMV0003CN-G 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -71No.PS-OMV0003CN-G , (1015 ) -72No.PS-OMV0003CN-G ,, (), No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

PSxx-OMV0008CN

11 12 13 14 15 OUT1 16 OUT2 17 NPN/PNP 18 Line 19 OFF() () -74No.PS-OMV0008CN-E 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -75No.PS-OMV0008CN-E , (1015 ) -76No.PS-OMV0008CN-E ,, (), No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

Digital Flow Switch (Remote type sensor unit)

Response time 7 s 2 Ambient temperature characteristics 5% F.S. 1: The rated temperature range is of a single temperature sensor.

LC6D/LC6C

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

Vacuum Unit Ejector / Vacuum Pump System

(Refer to Fig.4) 8) Mount the connector housing assembly for extra station(s) to the end plate D assembly. (Refer to Fig.4) (Insert two clips of the housing mounting surface to the square holes of the end plate, and slide the connector housing assembly.) 9) Remove the end plate U.

HEC-OM-S008

Host Computer Thermo-con RS-485 RS-485 Symbol Pin No Symbol FG Connector shell FG + 1 + 9 SG 5 FG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No Symbol FG Connector shell FG RD 2 RD SD 3 SD SG 5 SG RS Short CS Figure1-2 Communication Connection (RS-232C) 1-1 HECR Specifications of Communication Method 2 Specifications of Communication Method

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

PF-OMN0009_C

1.5 mm (41) (PF3W511 ) (M54 ) 2 mm (41) -17No.PF-OMN0009CN-F (PF3W504/520/540 ) ,(3.0,4 ) 8 0.50.7 Nm (41) , , 4 (PF3W511/521 ,(4.0,4 ) 1.01.2 Nm (41) ,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC