Slider Type Ball Screw Drive/11-LEFS Series

LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS40 6H9 depth 7 ( ) +0.030 0 (170) 106 Body mounting Note 1) reference plane 60 4 x M8 x 1.25 thread depth 13 LEF 58 LEJ LEL 74 7 6H9 depth 7 ( ) +0.030 0 LEM L Cable length 250 LEY A (Table traveling distance) Note 2) 86 (165) (86) 90 13 88 [(90)] (3.1) Stroke (90) [88] 61

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

8 6.5 counterbore depth 5.5 (Same on the opposite side) 3.4 through 2 x M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5 L (Hexagon bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10 L (Hexagon socket head cap screw) 2 x M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2 x M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61

AS-FPQ/AS-FPG

8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8 25.3 18.5 18 32.4 18 (14.3) (36.4) (31.4) 8 15.2 27.5 20.5 34.6 20 20 4 10.4 26.8 17 33 33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AK 1/4 19 50 48.4 44.5 42.9 VCHC 13.3 32 (33) AS33l1FG-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS33l1FG-03-12(S)A 12 18.5 42.5 28.3 57 17 38 (39) AS43l1FG-04-10(S)A 10 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG-04-12(S)A 12 18.5 21 26.2 48.3 (48.2) 28.3 63.4 17 62 (61

AS-FPQ/AS-FPG

8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8 25.3 18.5 18 32.4 18 (14.3) (36.4) (31.4) 8 15.2 27.5 20.5 34.6 20 20 4 10.4 26.8 17 33 33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

16" 13.2 22.7 33 14.2 AS321FSG-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

26.7 37 35.9 15.6 48 (49) AS32l1FSl-U03-07 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-09 5/16" 13.2 22.7 33 14.2 AS32l1FSl-U03-11 3/8" 15.5 26.7 37 28.2 15.6 37 (38) AS42l1FSl-U04-11 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-13 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 62 (61

Speed Controller with One-touch Fitting

18.5 42.5 28.3 64.7 17 48 (48) AS331F-03-06(S)A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 AK 1/4 19 50 48.4 44.5 42.9 VCHC 13.3 34 (35) AS331F-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 35 (36) AS331F-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 38 (39) AS331F-03-12(S)A 12 18.5 42.5 28.3 57 17 40 (41) AS431F-04-10(S)A 10 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 61

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

AZ1000

. 5.6 (142.2) (When selecting option code P) 1.5 (38.1) 2.25 (57.2) 0.69 (17.5) 2.00 (50.8) A 0.88 (22.4) Connections inch A 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) (mm) FV4 MV4 FV6 MV6 TW6 (94.0) 3.70 (119.4) 4.70 (75.2) 2.96 Flow Characteristics 760 0 AZ1100 Inlet pressure: 2 psig (14 kPa) 700 -8 Delivery pressure (mm Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61

C76

Bore Single acting/Spring extended Auto switch model B A 32 40 32 40 8 13 8.5 13.5 137 137.5 82 87 82.5 87.5 32 37 32.5 37.5 57 62 57.5 62.5 107 112 107.5 112.5 D-C7/C80 D-C73C/C80C D-J79C D-A73 D-A80 D-A72/A7H/A80H D-A73C/A80C D-F7/F7W D-J79/J79W D-F7WV D-J79C D-F7BAL, D-F79F 32 9 83 33 58 108 40 14 138 88 38 63 113 105 110 32 40 32 40 6 11 7 12 135 80 85 81 86 30 35 31 36 55 60 56 61

C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...

CG5-S

For solid state switches with flexible specification, enter "61" after the lead wire length. Type Solid State Switch 1ms or less Operating time 1000m/s Impact resistance Insulation resistance D-H7BA50M or more at 500VDC (between lead wire and case) (Example) 61 1000VAC for 1 min.

ISO Standard Hydraulic Cylinder

valve F K MA C NA Air release M NB A SS B Rod side cushion valve TZ TX S + Stroke ZZ + Stroke H Rod side air release Stroke range Bore size (mm) E GB J M NA P PJ TD C F GA NB B S SS TX TZ H K D G MA A MM -0.016 -0.043 16 40 7.5 55 79 8 25 to 800 M6 x 1 M16 x 1.5 46 29 34 33 16 3/8 58 12 52 40 107 54 19 47 22 22 19 20 50 25 to 800 M8 x 1 9 M20 x 1.5 46.5 28.5 42 16 3/8 58 34 65 50 15 108 61

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) L2 L1 27 P = 10.5 13.5 28 (5.25) Applicable connector: D-sub connector (25P) (Complies with MIL-C-24308) 63.5 <67.5> (12) 13 Indicator light Manual override 1.5 4.8 66 40.7 25 9.3 (5.5) (35) B A B A B A A A A B A 93.5 <100.4> 40.5 M4 mounting hole 2 35 [25] 61 Stations 8 7 6 5 4 3 2 1 n D side U side [ ]: 25 pins (top entry) C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

PEND 11-6-1 2 Mini-rotary Actuator Series CRJ Rack & Pinion Style/Size: 05, 1 43 (54) 48 (61) Compact Compact Lightweight Lightweight CRJ05:32 g (39 g) CRJ 1:54 g (67 g) CRJ05: 32 g (39 g) CRJ1: 54 g (67 g) 19.5 23.5 13.5 16.5 Top CRJ05 Bottom CRJ1 Numbers in ( ) are for 180.

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(;le';'61 II> ~ 102 59 62 50 135 44 11 9 147 ~... > C .. S ' 101 73 111 89 74 102 84 91 Rod flange: Head llange: 301 267 44 330 Foot: L,.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

330.2 42 20 8 8 6.5 counter bore 5.5 (Same on the opposite side) 3.4 through 2-M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5L (Hexagon bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10L (Hexagon socket head cap bolt) 2-M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2-M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61

15

10.5 22.5 16.5 8.6 25 5.5 76 74 28 51 2 10 95 4.5 9 12 Bumper bolt Adjustment bolt P Shock absorber PB T PA R S ZZ PW Q QW R1 TT UU W Y1 Y2 Model NF NN adjustable range adjustable range Nil TN TF (Both sides: R1 x 2) (Both sides: Y1 + Y2) CY1SG6-Z RJ0604N M4 x 0.7 M3 0.5 25 25 49 52 16 1 7.5 15 42 10 14 M6 x 0.75 46 11.5 7.5 19 66 15 CY1SG10-Z RJ0806HN M8 x 1 M4 x 0.7 M5 0.8 25 38 61