High Vacuum Angle Valve, XL Series

17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69 31 Series XSA Normally

XMC/XYC Series

Bonnet assembly/construction part number:1 Valve size Temperature specifications 16 25 40 50 General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 Valve size Temperature specifications 63 80 General use XLC63-30-1-1 XLC80-30-1-1 High temperature XLC63-30-1H-1 XLC80-30-1H-1 Note1) The magnet for auto switch is not provided

VFR

Note 2) Min. operating frequency is once in 30 days.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

XMD/XYD Series

Bonnet assembly/construction part number:1 Valve size Temperature specifications 25 40 50 63 80 Caution General use XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1 High temperature XLD25-30-1H XLD40-30-1H XLD50-30-1H XLD63-30-1H XLD80-30-1H Note1) The magnet for auto switch is not provided. When the magnet for auto switch is necessary, add -M9// at the suffix of the part number.

OMU0023

[ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E ~ 31 1F US 63 3F ?

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating 5.0 100 Peak voltage value No-load voltage (V peak) 0 to 20 [V] Over 20 [V] to 30 [V] 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

MXF

Nil S n 8 12 16 20 10, 20, 30 20, 30, 50 30, 50, 75 30, 50, 75, 100 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Table of Contents

50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke

0.5

Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30

CXT

For detailed specifications, refer to page 8-30-1.

CE

14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5 49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.

C95Series

oO OUT 12,17 304 609 913 1217 1522 1765 30 IN 11 .08 277 554 831 1108 1385 1606 Note) Theoretical outpul(lbl) :: Pressure (pSI) X Piston area (IrI(:h2) Bore SlZ9 .

20

Blow Gun New New RoHS 20% reduction 20% reduction with the SMC Blow gun + S coupler + Coil tube in power consumption 10% reduction with the Blow gun (VMG) only New New With cover Extension nozzle Added 100 mm and 150 mm lengths Pressure loss 1% or less Amount of electricity used in a factory Actuators 10% Air 20% DOWN 20% Air leakage 20% Coolant 30% Air blow 56% Air blow 70% Others 50% SMC

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Free Mount Cylinder Double Acting, Single Rod Series CU 6, 10, 16, 20, 25, 32 How to Order CU 6 30 D 30 6 30 M9BW CDU With auto switch D Made to order Refer to page 484 for the Made to Order specifications. Built-in magnet Number of auto switches Bore size 2 pcs. 1 pc.

5 Port Solenoid Valve SY Series

Bracket (For F1) SX 000-16-2A (with mounting screw) Bracket (For F2) Mounting screw tightening torques SY3000 (M2): 0.12 Nm SY 000 (M3): 0.6 Nm SY9000 (M4): 1.4 Nm 5 7 4 Body Ported How to Order Pilot Valve Assembly How to Order Connector Assembly for L and M Plug Connector 30 4A SY100 For DC: 5 G V111 30 1A SY100 For 100 VAC: Light/surge voltage suppressor Coil specifications 30 2A SY100

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

30 37 47.3 d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 Part no.