IR1000/2000/3000

AL 14-5-21

CNS

19 14 190 100 230 155 16 Up to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 180 18.5 Up to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 215 Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 303 20 23 110 432 87.5 85.5 28 30 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 343 20 28 110 472

Cylinder with Lock Series CNS

19 14 190 100 230 16 155 to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 16 180 to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 18.5 215 (mm) Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 85.5 303 87.5 20 23 110 432 28 30 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 93.5 343 95 20 28

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

SMC Pneumatic Clean Series

18 25 Bore size 20 25 32 40 76 92 104 128 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 Note) End boss is machined on the flange for E.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Refer to Semi-standard on page 562 for details. 16 SOL.B 18 17 14 16 15 SOL.A () () (+) (+) 12 Station 3 14 13 SOL.B Triangle mark indicator position 10 12 11 SOL.A () () (+) (+) 8 Station 4 9 10 SOL.B 6 8 7 SOL.A () () (+) (+) 19 Station 5 SOL.B 6 5 17 Note) When using the negative common specifications, use valves for negative common.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Refer to Semi-standard on page 562 for details. 16 SOL.B 18 17 14 16 15 SOL.A () () (+) (+) 12 Station 3 14 13 SOL.B Triangle mark indicator position 10 12 11 SOL.A () () (+) (+) 8 Station 4 9 10 SOL.B 6 8 7 SOL.A () () (+) (+) 19 Station 5 SOL.B 6 5 17 Note) When using the negative common specifications, use valves for negative common.

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

Table of Contents

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 46 58 25 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

CLS

14 14 17 17 20 19 19 22 26 26 30 19 19 19 24 24 29 14 20 20 25 25 30 Up to 1000 3 5 30 46 114 M14 x 1.5 161 78 18 160 110 146 128 212 112 255 16 64 110 Up to 1000 130 M16 x 1.5 182 95 23 180 132 169 144 236 118 275 18.5 74 120 Up to 1200 16 21 35 30 34 42 5 5.5 6 149 M18 x 1.5 204 106 36 118 200 167 195 162 265 132 320 18.5 86 135 Up to 1200 165 226 124 40.5 131 225 187 216 182 280

HRX-OM-Q026

Flow switch Blue (DC COM) Brown (24 VDC) Terminal No. 14 Brown (24 VDC) 6 Terminal No. Flow switch 5 Terminal No. Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No.

VQ4000

Polarity Lead wire color Dot marking Release valve SOL.A 1 1 () (+) Black None SOL.B 14 14 (+) () Yellow Black 1 station 1 14 1 2 3 Stations Pressure switch SOL.A 2 2 () (+) Brown None 2 U side 15 VQC SOL.B 15 15 (+) () Pink Black 2 stations 3 16 4 SOL.A 3 3 () (+) Red None SOL.A 17 D side 5 SOL.B 16 16 () (+) Blue White 3 stations SQ SOL.B 18 6 19 SOL.A 4 4 () (+) Orange None SOL.A 7 SOL.B

Pressure Control Equipment

= 50 cm3 2 Note) Refer to the bowl capacity of auto feed tank. 14-13-2

E-P HYREG ® Series VY1 1

(With spring washer) ( ) View A 14-10-12 13 E-P HYREG Series VY1 Related Products: Precautions Silencer (Series AN) Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reducing effect: 30 dB or more.

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9