Compact Hydraulic Cylinder

Related Products DDimensions B + Stroke A + Stroke (mm) A 55 to 100 mm strokes B 55 to 100 mm strokes Bore size (mm) 32 40 50 63 80 100 65 67 76 80 89 95 73.5 75.5 87 91 100 107 Dimensions other than the above are the same as the standard double acting single rod type.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25 20 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 200 to 1000 150 to 1000 150 to 700 150 to 700 866 Sine Cylinder 1011-REC 1011Rod flange (F): RECF 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

0.4

HIROSE ELECTRIC CO., LTD. 55 2 x M2.6 x 0.45 Socket side 14 25 1 13 Terminal no. 47.04 Note 1) Types with 15 pins are also available. Refer to page 418 for details. Note 2) Lengths other than the above are also available. Please contact SMC for details. Note) For CE-compliant models, DC-type only.

0.4

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of branch type)) (DIN rail clamp screw) R R R BUS 76.7 76.5 12 3 X 3 3 72 BUS IN B X 49.5 B B B B B B B P X P 12 P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT AT 14-20-55 Made to Order ID ID Medium pressure specifications Max. operating pressure 1.4 MPa White vaseline specifications Using white Vaseline for the lubricant. AMG AMG AFF AFF Copper-free Eliminates the effect of copper ion or fluoric resin, etc. for a color CRT. Clean Series Usable inside clean room. 14-20-58 Special Specifications AM AM Misc.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Refer to Made to Order Specifications on page 14-20-55. Water separator can remove water droplets, but it cannot remove moisture.

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

CE

clevis style: CE1D Bore size Stroke MVGQ CX + 0.4 + 0.2 CC CZ 0.1 0.3 RB J 2-O (Special cap bolt) CD hole H10 Shaft dg RR CU CW DCL + Stroke A + Stroke -X 20Data Foot style Rod side flange, Head side flange Double clevis style A Head side flange A Bore size (mm) LA LB LD LE LH LL LS LX LY LZ FG FL FV FX FZ A CD CL CU CW CX CZ RR 12 20 106.5 4.5 8 4.5 29.5 17 2 85 34 52 44 4.5 5.5 25 45 55

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

62 8-14-20 20 Mechanically Jointed Rodless Cylinder Series MY3A/3B Side Support Side support A MY-SA 2-G E MX F 2-H B A D C MTS MY Side support B MY-SB CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Outside Local Area: (800) 258-9200-www.stevenengineering.com Reed switch (2-wire, 3-wire) Solid state switch (2-wire, 3-wire) 2-color indication solid state switch (2-wire, 3-wire) Auto switch CX +1 0 mm Stroke length tolerance DMXP16 Theoretical Output -X (N) 20Operating pressure (MPa) Piston area (mm2) 0.2 Bore size (mm) 0.3 0.4 0.5 0.6 0.7 Data 6 28 6 8 11 14 17 20 10 79 16 24 32 40 47 55

Electromagnetic Digital Flow Switch

The straight piping length shall be 5 times (5D) or more of the piping size to achieve the stable measurement. 3 Accuracy change [% F.S.] 2 [mm] 1 Model Straight piping length D 5D LFE1 11 55 LFE2 21 105 LFE3 27 135 [Port size] [Measurement conditions] Fluid: Tap water Pressure: 0.2 MPa 0 D 2D 3D 4D 5D LFE1: 3/8 inch LFE2: 3/4 inch LFE3: 1 inch 0 Straight piping length Operating Pressure

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.

S Couplers

A T -03M R 3/8 7.7 31.8 78.5 40.5 47.0 1/4 22 24.2 -04M R 1/2 86.6 42.0 50.0 KM KKA6S-03M R 3/8 149.1 44.9 51.4 D -04M R 1/2 10.2 55.3 160.4 46.4 54.4 1/2 30 30.7 KF -06M R 3/4 184.8 46.9 56.4 KKA7S-04M R 1/2 426.1 68.1 76.3 M H -06M R 3/4 13.6 101.5 457.8 69.8 79.3 3/4 36 42.5 H/DL L/LL L -10M R 1 514.0 72.4 82.8 KKA8S-06M R 3/4 873.5 85.4 94.9 -10M R 1 17.6 169.9 931.1 88.0 98.4 1 46 55

Thermo-chiller

fluid*1 Tap water, Deionized (pure) water Set temperature range C CH1: 15 to 25, CH2: CH1 + 0 to 15 Cooling capacity (CH1, 2 total) 50/60 Hz*2,*10 kW 9.5/11.0 Heating capacity (CH1, 2 total) 50/60 Hz*3 kW 2.0/2.5 Temperature stability*4 C CH1: 0.1, CH2: 0.5 Circulating fluid system Rated flow 50/60 Hz*5,*11 L/min CH1: 25/35 (0.5 MPa), CH2: 2/2 (0.5 MPa) Max. flow rate 50/60 Hz*11 L/min 55

HRS100/150

5 to 45 Circulating fluid Note 2) Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating fluid system Rated flow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum flow rate 50/60 Hz L/min 55