Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15

Miniature Regulator

ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R1/8, M5 x 0.8 NPT1/8, M5 x 0.8 Rc 1/8 Symbol NPT 1/8 4 One-touch fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

2

INDEX 204 Series AW10-A to AW40-A Dimensions AW10-A AW30-A to AW40-06-A Bracket (Option) S A N T F J D U M J U D J J M S N T Bracket (Option) B C R F Q V R IN OUT H C Q V 2 x P1 (Port size) P2 Pressure gauge (Option) IN OUT (Pressure gauge port size) H Clearance for maintenance G Pressure gauge (Option) Drain 2 x P2 B AW20-A (Pressure gauge port size) Bracket (Option) U J D M J N T S F E

Table of Contents

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

A

500 27 30 60 44 16 32 10 15 15 M 8 x 1.25 6 M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40

Air Slide Table

MXQ 6A-mm4 With buffer, end lock (6) J Q 5 5.5 Pilot port 2 x M5 x 0.8 0.5 7.5 15 8.5 5 3 31.4 34 21 23 3 28 3 2 x M3 x 0.5 thread depth 5 MXQ6A-10Z4 M Pilot port 2 x M5 x 0.8 17.5 16.6 2.3 (Plug: Width across flats 7) Dimensions [mm] 5.5 Model J Q Standard type Shorter total length type ZZ M M MXQ6A-10Zl4 57.5 25 81.5 72 77 MXQ6A-20Zl4 91.5 82 MXQ6A-30Zl4 78.5 J 5 ZZ * Dimensions other than

Table of Contents

M1 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max. at 420 mm/s in Graph (3).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

Table of Contents

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

Modular Design with Uniform Body Style

M N F S 2 x P1 (Port size) 2 x P1 (Port size) J M R R V2 V1 Q1 Q1 B C C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size) U P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC50

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 02: KJH02-M5,04: KJH04-M5 15 With Buffer: Vacuum Inlet Series ZP3 Vertical Pad diameter 1.5 to 3.5 Flat Pad type Vertical Dimensions/With Buffer: Vacuum Inlet 3, 6 mm Stroke With Buffer: Vacuum Inlet Pad Unit ZP3-T015U;J -B3 ZP3-T015U;K -B3 ZP3-T02U;J -B3 ZP3-T02U;K -B3 5 5 7 7 M3 x 0.5 M3 x 0.5 M3 x 0.5 M3 x 0.5 Vertical Width across

Rotary Actuator/Vane Type

Y2 Y2 F E L L E MSZ 2 x Q4 2 x Q4 K CRQ2X MSQX K C B D G D G B C U H U H MRQ N M T M T N 2 x R 2 x R (34.5: Connector type) 1 Auto switch 25.5 P Auto switch P W1 W Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 Refer to page 77 for details of shaft type J. 65 *1.

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11

CV/MVGQ

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.