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How to find the flow rate for air/ Flow rate formulas based on the air temperature of 20C For subsonic range where P + 0.1013 < 1.89 (P + 0.1013) Q = 226S P(P + 0.1013) For sonic range where P + 0.1013 1.89 (P + 0.1013) Q = 113S (P + 0.1013) Q : Flow rate [l/min(ANR)] S : Effective area (mm) P : Pressure drop P P (MPa) P: Upstream pressure (MPa) P: Downstream pressure (MPa) How to make

Please refer to P.125. Specifications AP3200 Normally closed (N.C.)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread)

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [dm3] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø4 One-touch Fitting, Straight Type, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø6 One-touch Fitting, Straight Type, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø1/4" One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C4H (ø4 One-touch Fitting, Straight Type)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type)

Cable connector (4-wire) Straight type Cable connector (4-wire) Right angle type 50 Mounting hole 4 x 7 F.R.L. (31) AV E REGULATOR P C M S E REGULATOR P C M S AU RESET 40 52 SET AF ITV1000 ITV1000 LOCK UNLOCK AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Setting

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for