CU

counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

) rubber hose 12 10 Cylinder bore size 40 9 Flow rate (l/min) 5 8 Cylinder bore size 32 7 6 Cylinder bore size 25 4 (steel pipe I.D.) 5(approx. 4.5) 4 Cylinder bore size 20 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 2.8 General range of rubber hose (max. 5m/s) General range of steel pipe (max. 4.5m/s) Flow velocity inside pipe (m/s) Piston speed (mm/s) How to read the chart: Example) The

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 4 x MM thread depth J Cylinder tube outer circumference: Hard chrome plated + special treatment Note 1) 0 -0.1 L H B G E 2 x P (Piping port) G NN Effective thread length T (R) D X Mounting nut width across flats C NA I N W K N F F S + Stroke ZZ + Stroke Note 1) 50, 63: L 0 -0.2 8 x V Effective thread depth Y H A B E G Mounting nut width across

ML2B

(N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

ML2B

Calculation of Absorbed Energy for Stroke Adjusting Unit with Shock Absorber (Nm) Vertical collision (Upward) Vertical collision (Downward) ML2B25 Horizontal collision: P = 0.5 MPa Horizontal collision 2000 1500 m s Stroke adjusting unit m Type of impact s Piston speed (mm/s) 1000 s Air cushion RE A B m 500 400 300 REC 1 m2 2 200 Kinetic energy E1

Serial Transmission System Series EX250 Series EX500

P, R ports Stations Note 4) K 01 1 station N R S T Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

ZSE F/ISE

or 98 m/s2, whichever is smaller 980 m/s2 in X, Y, Z directions 3 times each (Not energized) 3% F .S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel 630, Fittings: Stainless steel 304 02: R 1/4, M5 x 0.8 T2: NPT 1/4, M5 x 0.8 5-wire oil proof heavy-duty cable (0.15 mm2) Approx. 120 g (Each including 3 m lead wire) PF2 Enclosure

3

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

CHKD/CHKG

CHKDB50 -5 (M) CHKDB20 -5 (M) 70 CQ-M10 x 70L 55 CQ-M5 x 55L CHN -10 (M) -10 (M) 75 x 75L 60 x 60L -15 (M) -15 (M) 80 x 80L 65 x 65L CHM -20 (M) -20 (M) 85 x 85L 70 x 70L CHS -25 (M) -25 (M) 90 x 90L 75 x 75L 12.4 -30 (M) -30 (M) 95 x 95L 80 x 80L 15.8 CH2 -35 (M) -35 (M) 100 x 100L 85 x 85L -40 (M) -40 (M) 105 x 105L 90 x 90L CHA -45 (M) -45 (M) 110 x 110L 95 x 95L -50 (M) -50 (M) 115 x

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

valve S is removed from the valve S assembly and opens until the adjusted opening setting. 8 6 XMD/XYD-25 [3] Opening of the main exhaust valve (valve M) When pressure is applied to the pilot port M, the valve M is removed from the body seat surface and fully opens. 4 2 0 [4] Closing of the initial exhaust valve, the main exhaust valve By removing the pressure from the pilot ports S and

25

Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume

Compact Cylinder with Air Cushion Series RQ

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Rolled steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50 Applicable bore size (mm) Snap ring l Part no.

VK3000

of A and B port 20 stations Type S41 Nil F N T Rc S Type VK334 Type VK3140 Port size G M5 M5 x 0.8 C4 4 cassette NPT P port: Rc 1/8 NPTF R port: Rc 1/8 B port: M5 x 0.8 A port: M5 x 0.8 Type 42: Base mounted (A, B port side ported) How to Order Applicable solenoid valve VK3140 VK334 Type VK3140 VV5K3 42 05 01 Type VK334 Applicable blanking plate assembly VK3000-7-1A Valve stations Solenoid

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

CLK1

1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with Lock

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Rc NPTF G NPT F N T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Rc NPTF G NPT F N T, F, N are order made specifications.

Soft Start-up Valve

With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings