CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

CL

e r t y u i o !

VK300

Port size (A port) Option M5 M5 x 0.8 01 1 8 Nil None With bracket (Not assembled) P, R port: M5 Note1) AC-type models that are CE-compliant have DIN terminals only. Note2) For other rated voltages, please consult with SMC. F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

e-Rodless Actuator

The tightening torque should be 0.1 to 0.2 Nm. 5 to 6 14 e-Rodless Actuator Series E-MY2 Names and Functions of Individual Part Controller detail w t q u End Motor I/O cable Controller Power supply cable Slider i y e r Switch FG terminal Motor side end Description Content/Function q w e r t y u i Stroke learning switch Description Content/Function Switch to move the actuator to intermediate

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

7 t CRB2 Single vane For 180 (Indicates intermediate position) For 90 (Indicates A port pressurized) CRBU2 CRB1 @1 Component Parts MSU !1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CRQ2

x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

CG5-S

m t l m L H1 B1 Metric (mm) (mm) Part no.

5 Port Solenoid Valve, Series VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B T02 T03 G02 G03 VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported 1/4" NPT/NPTF 3/8" NPT/NPTF 1/4" G 3/8" G U-side end plate assembly 12 U-side end plate assembly

CY1F

x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 105 RB0805X552 CY1F25 CY1F25 Rc1/8 +0.012 0 NPT1/8 G1/8 5 1 5 9.5 depth 5.4 7.5 5.5 140 RB1006X552 Note 1) When adjusting the stroke, keep the T dimension

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

KR

(mm) Connection thread M thread Uni thread <M5, M6> <M5, M6> A Weight (g) L2 D1 D2 M L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

RSH/RS1H

/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9 19 109 49 5 12.5 10-9-20

RSH/RS1H

9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust