Rotary Actuator/Vane Type

hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Smooth Cylinder/Low Speed Cylinder

/s 100 mm/s or more y Follow-up speed Less than 100 mm/s Low adhesion Required w Required w Low adhesion Required w Low adhesion Not required (Except CJ2X and CUX10) Not required Not required q q qr 1 Consider using the smooth cylinder. 2 Consider using the low speed cylinder (new model). 3 Consider using the low speed cylinder (conventional model). 4 Consider using the low friction cylinder

SY

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

0.4

EX124D-SMJ1] Note 1) U S U S e w AXT100-1-P Note 2) U S U S SYJ AXT100-1-F Note 2) Note 1) Dust-tight, Water-jet-proof (IP65) Note 2) Top entry connector for FU, PU while side entry connector for FS, PS.

42

Figure shows VV5Q41-08C12SQ-W.

SQ1000/2000

0 Port plugs> CP F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit Nil E F0 P0 PC0 J0 Nil S0 DIN rail mount type Direct mount type q VVQZ2000 w

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(With option W) OMRON Corp.: CompoBus/S (16 outputs) R1 Protocol SI unit part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(With option W) OMRON Corp.: CompoBus/S (16 outputs) R1 Protocol SI unit part no.

Hydraulic

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

Profi-E

LED i ndi cat i on I t em Li ght s up G oes of f RU N Li ght s w hen t he pow er i s t urned on ( G reen) Li ght of f w hen t he pow er i s cut D I A Li ght s w hen di agnost i c error occurs ( Red) I nt ernal operat i on i s norm al BF Li ght s w hen PRO FI BU S com m uni cat i on error occurs ( Red) PRO FI BU S com m uni cat i on i s norm al M ount i ng and I nst al l at i on I nst al

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

1 Drain q r e w t i u y o !0 !

ZP3

w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Integrated Controller

[kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55 50 45 40 35 30 25 20 15 10 5 0 15 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 3000 mm/s2 5 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800

Table of Contents

Fixed 4% F .S.

Vacuum System Peripherals:

Light/Surge voltage suppressor DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Pilot valve specifications Nil Nil Individual specifications Common specifications Z With surge voltage suppressor S Y With light/surge voltage suppressor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside