3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Length per roll (m) Tubing material Symbol T Material Nylon Symbol TI Material Nylon Symbol 20 20 m (Standard) Length Metric size Inch size TS Soft nylon TU Polyurethane TIS Soft nylon TIU Polyurethane Color Symbol B Color Black Symbol B Color Black Nylon Soft nylon Inch size Tubing size W White BU Blue W White Metric size Size Size R Red Symbol Symbol 0425 O.D. 4 6 8 8 10 10 A05 Size O.D

ZSE F/ISE

3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50 02 22 M L For positive pressure ZSE50 02 M F 22 L For compound pressure Courtesy of Steven Engineering, Inc.-

CE2

10 m, 15 m, 20 m J 60C Nylon tarpaulin Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (Pilot port: Expect RC) 1 4 With sub-plate 02 SYA5000 3 position closed center 00 3 1 4 02 With sub-plate 3 8 With sub-plate

SYA3000/5000/7000

P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1 N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With sub-plate 02 SYA5000 1 4 3 position closed center 02 With sub-plate 3 3 8 With sub-plate 03 3 position exhaust center 4 3 position pressure

HRX-OM-R005

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R005 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R

F/ISE

3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1

Electro-Pneumatic Valve NVEP/NVEF Series

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

NVEPA|VEFseies

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

VXA31/32

VC Model VDW VQ Thread type Nil T F N Orifice size Rc NPTF G NPT 1 2 3 4 1.5 mm 2.2 mm 3 mm 4 mm VX2 VX Refer to the table (1) given below for availability. VX3 Port size 01 02 03 1 8 1 4 3 8 VXA Valve/Body 4 Common/Single unit Refer to the table (1) given below for availability.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) CLQ Lead wire length MLGP 5 m None Nil L 0.5 m 3 m Z N RLQ Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.

VCB

Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

4/5 Port Air Operated Valve Series SYJA3000 1

Lubrication Not required Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) Note 1) In the case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.