HRX-OM-W002

G G4 [ ] 4 18AWG G/Y 18AWG G/Y 4 Inverter IV L2/N W W 2 2 [ ] 3 18AWG BK 18AWG BK BK 3 W V M V [ ] 2 18AWG BK WH 8 8 2 V G 3 L1/L U U 1 1 [ ] 1 18AWG BK 18AWG BK RD 9 9 1 U PM PUMP 5 5 (CN3) 7 7 6 6 4 4 3 3 PM PUMP 2 2 PM PUMP 1 1 16AWG G/Y G4 [ ] 2/2 G V (CN1) PM 16AWG G/Y G4 [ ] G U Standard BL BL DC Power Supply Condenser DCPS [ ] 18AWG G/Y G2 5 5 C3 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) q Bonnet assembly (Maintenance parts)1 Indicator (Option) (Including w, e, y, u, i, o) Port 1(P) (Pressure port) Magnet (Option) Pilot port !

REA/REB

D 2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

Prevents Micro-Bubbles

Dimensions Y 4-Mounting hole for W LLHA--C Stations K A N G L3 L2 L1 Non-locking type Locking type 60 (H2) (H1) C U E R Pitch = B A (OUT) port n-P P (IN) port 2-P (mm) Dimensions (mm) B C E G H1 H2 K N P R U W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 50 31 65 20.5 10 85.5 87 18 27 Rc1/4, NPT1/4 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 37 90 25.5 19 112.5 114.5 39 37 Rc3/

Table of Contents

for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 7 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

Modular F.R.L. Unit

for maintenance A G G H M AW30, 40 Panel fitting dimension D Y T J N W Bracket (option) U IN OUT S Z B C Q Plate thickness AW30: Max. 3.5 AW40: 5 P V IN OUT K Pressure gauge (option) OUT Pressure gauge port size Square embedded type pressure gauge (option) Port size E Drain Min. clearance for maintenance A AW10, AW20 AW30, AW40, AW40-06 Applicable model Drain cock with barb fitting With

CC-Link-E

t y w i t h l ow ri ppl e.

Electric Actuator with Integrated Guide

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting

Thermo-chiller

Power consumption P: 7 [kW] Q = P = 7 [kW] Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] w Derive the heat generation amount from the power supply output.

CG5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

CY1

D1.6x P First tentative bore size determination 0.1xWcos+Wsin D5.0x P 0.1xW+W D5.0x P W W>WV P>PV Determination of allowable load weight & pressure Inclined operation (Refer to p. 39 for vertical operation.)

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

MY2

6 Single axis type/MY2H w @2 t @1 @9 #8 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Stopper Cylinder

7.5 43.5 61 17.5 E W 4 x M4 x 0.7 effective depth 7 Y Q F 2 x M4 x 0.7 effective depth 7 15.5 0.5 Mounting bolt for rod cover 2 parts 15.5 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke 25 Y E W Q F T 0 0.1 D 2 x N through 4 x O counterbore E 2 x P (Rc, NPT, M thread) Stroke RSQB -DZ (Double acting) Bore size: 16, 20 16 20 Y Q F A + 2 stroke B + Stroke V H + Stroke Width

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Contents Series Bore size (mm) Kit no. 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W CBG1N50-PS-W CBG1N63-PS-W CBG1N80-PS-W CBG1N100-PS-W Order seal kit in accordance with the bore size. Order seal kit in accordance with the bore size.