4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Electric Actuators

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Made to Order

(for std model) w-1 From P. 1188 w-1 From P. 1208 MY1B-Z Linear guide type MY1H-Z Basic type MY1B With cover (W) is also available. MY1M (W) Slide bearing type w-1 From P. 1238 With cover (W) is also available.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

SQ1000/2000

1 Port plugs> CP VVQZ3000 w e r t

A

IS1000E-402 14 33 87 66 17.5 IS1000E-403 38 AC4000 IS1000E-404 12 IS1000E-406 34 50 87 66 17.5 H O W T O O R D E R P R E S S U R E S W I T C H *Without Yoke Clip.

smcmaintenancepartslist

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For "R" and "U", DC voltage is only available. Power saving circuit is only available in the "Z" type. Power saving circuit is not available in the case of "W" type.

Table of Contents

1 Drain q r e w t i u y o !0 !

Rotary Actuator

CRQ2 +4 0 R o t a MSQ ti o 0 9 n y r a a w n y g e e k f of o MSZ k e e g y n R w a ot r a at n CRQ2X MSQX y o io 9 ti n 0 a ra t +4 0 n o g R e MRQ of k e y w a y 9 +4 0 0 Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

Modular F.R.L. Units

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

SY

fitting) C8 (8 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size A, B port P to A/B 4.68 (0.26) A/B to R 4.68 (0.26) C6: P to A/B 12.6 (0.7) A/B to R 12.6 (0.7) C8: Valve effective area Note 2) mm (Cv factor) For 2 to 10 stations: W = 22n + 118 For 11 to 20 stations: W = 22n + 140 For 2 to 10 stations: W = 47n + 156 For 11 to 20 stations: W = 47n + 190 Manifold

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !