Soft Start-up Valve

) 2(A) 1(P) 37.5 Bracket (Option) T M N P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33

Fieldbus System

10 P. 12 How to Order Specifications Parts Description Dimensions Series SV (IP67) End Plate Unit to supply power to the EX600 system P. 2 P. 8 P. 10 P. 11 How to Order Specifications Parts Description Dimensions P. 25 Handheld Terminal Series S0700 (IP40) Parameter setting and I/O monitor tool P. 2 P. 8 P. 9 P. 11 How to Order Specifications Parts Description Dimensions P. 33

33

Compressor Fan Valve Triple control Power consumption reduced by 33% Conditions 100 VAC Frequency: 60 Hz Circulating fluid temperature in the rated operation: 20C Ambient temperature: 25C Load: 1200 W Flow rate: 7 L/min Circuit diagram * This circuit construction of the position of the parts may be different from actual product.

Speed Controller with Uni One-touch Fitting AS Series

AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 7.8 8.9 11.4 13.2 15.2 8.9 11.4 13.2 15.2 17.9 13.2 15.2 17.9 13.2 15.2 17.9 17.9 21.4 20.8 21.1 23.1 23.9 25.3 23.3 24.9 25.2 27.2 35.3 27.8 29.5 31.8 27.8 29.5 31.8 33.6 35.2 27.9 28.2 30.2 31.0 32.4 32.5 34.2 34.5 36.4 44.5 39.3 41.0 43.3 39.3 41.0 43.3 47.9 49.5 17 17 18 19 19 32 33

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

) 52-SY7140 (R) -L13.5 02 03 79.2 41.7 61 10.4 21.5 2 x 4.3 (Mounting holes) 21 Manual override M5 x 0.8 (External pilot port) 4 B A Insulation: Black () 23 PE B A 38 46 Insulation: Red (+) X EB EA P 21 69 6.4 21.5 123.3 67.2 M5 x 0.8 (Pilot EXH. port) 71.2 (For E type) L (Lead wire length) 4.1 1.55 0.3 mm2 26.5 11.5 13.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Speed Controller with

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002F3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002F 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052F 4.5 19.6 24.6 17 38 28 4.5 6.5 9.5 15.5 AS-30L AS3002F 24.8 29.8 22 43 33 1.4 AS-40L AS4002F 25.7 30.7 28 49 39 3.5 18.2 23.2 11 3.5 18 11.3 1.6 AS-20D AS2002F 18.6 23.6 12.6 19.6 AS-25D AS2052F 4.5 4.4 22 27 17 4.4 25.8

EXxx-OMY0006CN

()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10. SI . 49 10.1. . 49 10.2. . 51 10.3. . 53 10.4. I/O . 53 10.5. I/O . 54 10.6. . 54 10.7. . 59 10.8. Output status unit . 59 10.9. LED . 61 10.10. . 65 10.11. DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11.

EXxx-OML0010CN

Parameter Setting() 33 5.

PFM7.eng

Over current error Without flow adjustment valve (using ZS-33-M) With flow adjustment valve (using ZS-33-MS) If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident. The switch output load current (OUT2) has exceeded 80 mA.

PFM5.eng

Flow adjustment valve Without flow adjustment valve (using ZS-33-M) With flow adjustment valve (using ZS-33-MS) Flow indicator LED Lock ring Power indicator LED Mounting screws Mounting screws PFM5 Connector Piping port (OUT side) Thank you for purchasing an SMC PFM5 Series Flow Sensor.

HRX-OM-T004

Operation start timer setting status signal output Operation stop timer setting status signal output Recovery from power failure setting status signal output Anti-freezing setting status signal output Contact input signal 1 pass through signal output Contact input signal 2 pass through signal output Warming up function setting status output Contact output 3 operation Setting and checking 33

HRX-OM-R028

output Operation stop timer setting status signal output Recovery from power failure setting status signal output Anti-freezing setting status signal output Contact input signal 1 pass through signal output Contact input signal 2 pass through signal output Warming up function setting status output Signal output during automatic fluid filling Contact output 3 operation Setting and checking 33

IP80-OM00019

A (1)(IEC79)ExdBT5 A ExdBT5 A) 164 ) B) () (1.5) 4 P368010-32 7.010.0 P368010-33 10.112.0 16 14 7.

SFOD-OMT0005CN

RSLogix5000 4.4 EtherNet/IP . 22 5 . 23 5.1 PWR . 23 5.2 MOT:ENC: . 23 5.3 SII/O . 23 (1) . 23 (2) . 24 5.4 P1P2: EtherNet/IP . 24 6 . 25 6.1 . 25 6.2 . 25 6.3 . 26 (1)(C24V,M24V,0V) . 26 (2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33

JXCx-OMT0001CN

3.3 . 11 3.4 . 11 3.5 . 11 1 . 11 (2) . 12 (3) . 13 3.6 . 14 1 . 14 (2). 17 (3) . 19 3.7 JOG . 20 (1) . 20 2 . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 3 . 24 (4) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26 4.1. . 26 4.2 EtherNet/IP . 27 4.3. . 28 4.4. . 30 -1No.JXC-OMT0001CN-C 1 . 30 2DIN . 30 4.5 . 31 (1) . 31 (2) . 32 (3) . 33

JXCx-OMT0034CN

12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41 12.4 . 43 13.

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

CE

Steel wire Stainless steel 9 20 to 63 27 Sensor setting piece assembly Case gasket NBR 10 12 to 32 28 Case screw gasket Stainless steel Pin NBR 11 32 to 63 29 Piston seal Lead-bronze casting NBR Sensor guide 12 32 to 63 30 Rod seal Carbon steel NBR Case setting nut 40 to 63 31 Gasket 13 Rolled steel NBR Cushion ring A 40 to 63 32 Cushion seal Rolled steel 14 NBR Cushion ring B 40 to 63 33

2–4

7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA