Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 1 Output+Analog Current Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: -, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 1 Output+Analog Current Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket C, Operating Manual/Certificate: None, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 1 Output+Analog Current Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter+Front Protection Cover, Operating Manual/Certificate: -, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: None, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: None, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: Bracket C, Operating Manual/Certificate: -, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: None, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: None, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket A, Operating Manual/Certificate: -, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter+Front Protection Cover, Operating Manual/Certificate: -, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: None, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: None, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: -, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Initial Value PSI, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: Calibration Certificate, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: None, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: None, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Current Output, Display Unit: w/Unit Display Switching Function, Lead Wire: None, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -
Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Current Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: Bracket C, Operating Manual/Certificate: -, Made to Order: -
DC 4 W Electrical entry Grommet (Standard), DIN terminal Semi-standard Note 1) At rated voltage CC CC Dimensions Stop valve side Skip valve side Rc 1/8 Pilot air port size Oil port size Rc Throttle valve locking screw Oil port size Converter side Oil port size Cylinder side 2 x S Wall mounting screw Unit port U1, U2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
T GA 18 S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72