Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

Speed Controller with One-touch Fitting

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

76 84 100 4.5 6 6.5 10 46h9 61h9 67h9 77h9 4 6 4.5 5 20 27.5 29 38 9.5 12 12 15.5 45h9 60h9 65h9 75h9 8 10 10 12 6.6 7.6 7.6 10 55.4 70.8 75.4 85.4 YC YB YA XC XB XA WF WD WC WB WA UU SU SF SE SD S Q P JU JJ JC JD WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Low Profile Guide Type

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 CY1L Load [N] 70 CY1H 60 15 50 CY1F CY1F 40 30 10 CYP 20 10 0 Adjuster holder 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Slit Valve

CAUTION 236 46 Cassette type Full MESK 49 532 Slit Valve XGT Series Dimensions Cassette type standard/XGT312 440 336 336 60 50 50 50 112 377 244 59 Valve seat side (XGT312, 313, and 311 common) Cassette type half MESK/XGT313 60 405 45 36 XLA XL 59 XLQ XM XY Non-cassette type/XGT311 D62 50 Opening size XSA 348 336 Opening size XVD XGT XGT 280 97 CYV 59 244 533 XGT Series Made to Order Specifications

XM, XY

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 481 b XMA, XYA Series Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature (C) 5 to 60 (High temperature

High Power Cylinder:

22 24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35 H 44 48 51 54.5 LD 7 7 7 9 K 5 5.5 5.5 7.5 JD 30.5 25.5 28.5 23 H2 8 8 9 11 Bore (mm) 20 25 32 40 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 LZ 55 55 60

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Special Application: 10-AF (Clean Series), Body Size: 50, Thread: N (NPT), Port Size: 10 [1 (Size 50, 60)], Bracket: None, Bowl Type: 2 [Metal (Size 20 to 60)], Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

power supply (+) Lock release (+) [I/O cable] LEC CK4 Cable length (L) [m] 1 3 5 1.5 3 5 Controller side PLC side (16) (10) (11) (30) (60) (L) Conductor size: AWG26 Dot mark Insulation color Terminal no.

Clean Air Module

LVB3-8-3 Threaded type NPT 1/4 LVB3-8-4 End plate assembly 7 With 12 One-touch fitting LVB4-8-1 With One-touch fitting Rc 3/8 LVB4-8-2 Threaded type NPT 3/8 LVB4-8-3 Each module has 2 connecting brackets. 337 LLB Series Flow Rate Characteristics LLB3-1-P1R1VSF: Standard (100 L/min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60

Fluoropolymer Piping Equipment

Note) Metric size 6, 8, 10 10, 12 Inch size 1/8", 3/16", 1/4" 1/4", 3/8" 3/8", 1/2" LVC Orifice diameter 4.4 8 10 0.4 1.2 1.8 Flow rate characteristics Av x Kv LVA 0.5 1.4 2.2 Cv Withstand pressure (MPa) 1 LVH Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 LVD Ambient temperature (C) 0 to 60 Weight (kg) LVQ 0.055 0.115 0.185 Note) For details of the applicable tubing sizes

212

[0.25] Outlet pressure psi [MPa] Outlet pressure psi [MPa] Outlet pressure psi [MPa] 29 [0.20] 29 [0.20] 29 [0.20] 22 [0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60

Booster Relay Series IL100

IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Lock-Up Valve IL201/211/220 Series

IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 173

Ionizer Nozzle type IZN10 Series IZS

IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)

Compact Cylinder

mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 Refer to page 8 for cylinders with auto switches. 12 6 OUT 113 23 34 45 57 68 79 IN 85 17 25 34 42 51 59 Auto switch proper mounting position (detection at stroke end) and mounting height Minimum stroke for auto switch mounting Operating range Auto switch mounting 16 6 OUT 201 40 60

48

70 16 (12 x 2) 6 OUT 226 45 68 90 113 136 158 IN 170 34 51 68 85 102 119 20 (16 x 2) 8 OUT 402 80 121 161 201 241 281 IN 302 60 90 121 151 181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40