Slit Valve 0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
T GA 18 S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72
Magnet: D (Built-in), Mounting: E (Integral Clevis), Style: N (Non-lube Rubber Bumper), Bore Size: 32mm, Thread: TN (NPT Ports; M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 50mm
Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 32mm, Thread: TN (NPT Ports; M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 100mm
Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 32mm, Thread: Rc (M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 25mm
Magnet: D (Built-in), Mounting: E (Integral Clevis), Style: N (Non-lube Rubber Bumper), Bore Size: 25mm, Thread: TN (NPT Ports; M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 100mm, Auto Switch: G5BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Magnet: D (Built-in), Mounting: E (Integral Clevis), Style: A (Non-lube Air Cushion), Bore Size: 25mm, Thread: Rc (M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 50mm
: F (Slide Locking Type), A,B Port Size: Base Mounted Valve, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting Option: Mounting Screw, Round Head Combination Screw
Magnet: None, Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 32mm, Thread: Rc (M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 75mm
Magnet: None, Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 80mm, Thread: TN (NPT Ports; M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 300mm
Magnet: None, Mounting: L (Axial Foot), Style: N (Non-lube Rubber Bumper), Bore Size: 50mm, Thread: TN (NPT Ports; M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 1000mm
Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: RY (R + Y)
Magnet: None, Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 40mm, Thread: TN (NPT Ports; M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 200mm
Push Type, A,B Port Size: Base Mounted Valve, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting Option: Mounting Screw, Round Head Combination Screw
Magnet: None, Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Thread: TN (NPT Ports; M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 500mm
), A,B Port Size: Base Mounted Valve, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting Option: B (Mounting Screw, Hexagon Socket Head Cap Screw)
Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant)
Body Size: 4 (1/4 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: 02 (1/4), Applicable Tube OD: 08 (Ø8 mm), Sealant: S (Sealant), Lock Nut: J (Round)
Magnet: None, Mounting: E (Integral Clevis), Style: N (Non-lube Rubber Bumper), Bore Size: 20mm, Thread: Rc (M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 100mm
Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Thread: TF (M5 for Rubber Bumper and Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 100mm