CLK1

1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with Lock

Clamp Cylinder with Lock Series CLK1

1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) Non-locking push type Other (Semi-standard) Non-locking push type Power consumption DC Holding Inrush Apparent power AC VNB11V VNB12V TQ 12 (P1) 12 (P1) External pilot solenoid Manual override Note 1) For How to Order pilot solenoid valves, refer to page 570.

VXR21/22/23

Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,

Series VCL

Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CL2 49 20 24.5 28 4.5 38 17.3 34.5 58 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CL3 57 25.5 28.5 30 5.5 42 19.3 38.5 68 24 55 45.5 53 48 60 51 68 101 86.5 VV2CL4 57 25.5 28.5 30 5.5 42 20.8 41.5 76 26 62.5 47.5 60.5 50 62 58.5 70 103 94 6 Direct Operated 2 Port for

IDX-OM-Z004

-) 0 4.2 IDF100150F-W 4 9 IDX-OM-Z004 5 5 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 1 5.2 5.2 5.2 10% 5.2 IDF100150F-W 5.1 5 1 IDX-OM-Z004 5 1 10% 3 () 1 2 IN OUT INOUT () 424 IDF100150F-W 5.1 5 2 IDX-OM-Z004 5 5.2 1-3 51 3.6 OFF () ON OFF ON IDF100150F-W 5.2 5 3 IDX-OM-Z004 5 5.3 R () OFF OFF OFF ON ON IDF100150F-W 5.3 R 5 4 IDX-OM-Z004 6 6.1 IDF100F-30-W IDF125F

VG342

15 to +10% of rated voltage Inrush 12.7 (50), 10.7 (60) 7.6 (50), 5.4 (60) 4.8 W, 5 W (With indicator light) Power consumption Note) N.C.

IDX-OM-W095

11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

3 MGC Lube with double end lock CBA1-63A-PS-W CBA1-50A-PS-W CBA1-40A-PS-W CBA1-80A-PS-W CBA1-100A-PS-W 1 Lock bushing Zinc bronze die cast !4 Non-lube with double end lock 1 Lock spring Steel wire Zinc chromated !5 CBA1N63A-PS-W CBA1N50A-PS-W CBA1N40A-PS-W CBA1N80A-PS-W CBA1N100A-PS-W MGF 1 Bumper Urethane !6 @8, @9, #0, #1, #3, #4 are packed together as one set of packings.

Wireless System

For M8 EX9-AWES For M12 EX9-AWTS 17 Accessories EX600-W Series The signal name of I/O device and each unit address can be entered and mounted on each unit. t Marker (1 sheet, 88 pcs.)

VXA21/22

VX t Vaccuum pressure (Torr) The absolute pressure is expressed. 0 Torr=Absolute pressure 0.760 Torr=Atmospheric pressure (Gauge pressure 0 Kgf/cm2) (1 torr=1.33 X 102 Pa) VNl VQ Electrical Terms q Volt-ampere(VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W=V/A cos.

Support Guide/11-LEFG Series

L Basic static rated load 8350 13900 22000 34500 LEJ LEL Table Accuracy LEM LEY A side B side LES LEPY LEPS q 0.08 C side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02

Vacuum Equipment

Calculation Pad W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting W = P x S x 0.1 x 1 t This type of application should basically be avoided.

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) DC 12 (P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

Compact Guide Cylinder

R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported

70pvvna

Description Note Platinum silver painted Material Aluminum alloy TI/ TIL Cover assembly Body q Platinum silver painted Valve material (NBR, FKM, EPR) Valve material (NBR, FKM, EPR) Aluminum alloy Aluminum alloy w e PA Note) Plate assembly Valve element Note) Aluminum alloy r Piston assembly Travel spring Return spring Pilot solenoid valve t Aluminum alloy PAX Stainless steel y u i Piano wire

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

A pressure drop can be verified with the type with a clogging checker (-T) or with the type with a pressure differential gauge (Made to Order). w When the element has reached its replacement interval, replace it immediately with a new element. Replace the O-ring, the gasket, and the element with new parts.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

4 y r t !3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !