VPMW-700-5 1 5 30 0.5 1.0 VPMW-700-10 1 10 30 0.6 1.2 VPMW-700-30 2 30 30 1.0 2.0 Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description VPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting

VPMW-700-5 1 5 30 0.5 1.0 VPMW-700-10 1 10 30 0.6 1.2 VPMW-700-30 2 30 30 1.0 2.0 Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description VPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting

VPMW-700-5 1 5 30 0.5 1.0 VPMW-700-10 1 10 30 0.6 1.2 VPMW-700-30 2 30 30 1.0 2.0 Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description VPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting

VPMW-700-5 1 5 30 0.5 1.0 VPMW-700-10 1 10 30 0.6 1.2 VPMW-700-30 2 30 30 1.0 2.0 Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description VPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting

VPMW-700-5 1 5 30 0.5 1.0 VPMW-700-10 1 10 30 0.6 1.2 VPMW-700-30 2 30 30 1.0 2.0 Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description VPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting

VPMW-700-5 1 5 30 0.5 1.0 VPMW-700-10 1 10 30 0.6 1.2 VPMW-700-30 2 30 30 1.0 2.0 Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description VPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting

Clean Room Regulator/Fluoro Resin Type Series SRF30

1 !0 w !1 !2 w !2 Parts list !3 No.

Large blow and

ANR)] Discharge flow rate [L/min (ANR)] 4,500 ---6 ---6 3,000 Discharge flow rate 4,000 Discharge flow rate Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Vacuum pressure ---5 ---5 2,500 3,500 3,000 ---4 ---4 2,000 Suction flow rate 2,500 Suction flow rate ---3 ---3 1,500 2,000 1,500 ---2 ---2 1,000 1,000 ---1 ---1 500 Air consumption 500 Air consumption 0 0 0 0 0.0 0.1 0.2 0.3

PAB-OM-C007-B

C onnecting port C orrect tightening torque(N) 0 .0 9 0 liter(discharge amount per one cycle)5 0 million cyclesreferential life cycle Referential life date Operating frequency of Rc(PT )1 /4 Metal 1 2 1 4 Rc(PT )1 /2 Metal 2 8 3 0 Rc(PT )3 /8 Metal 2 8 3 0 Operation Manual P rocess P ump PA 5 *1 3 S eriesx 6 0 min. operating time per Read this manual carefully and thoroughly before using.

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

M9PWV M9BWV M9NAV1 Solid state auto switch Reed auto switch 5 V, 12 V 12 V IC circuit Diagnostic indication (2-color indicator) Relay, PLC 5 V, 12 V 12 V IC circuit Yes Yes No Grommet 24 V Water resistant (2-color indicator) 5 V, 12 V IC circuit M9PAV1 M9PA1 M9BAV1 M9BA1 12 V A96V A96 5 V 12 V IC circuit Grommet 24 V A93V2 A93 A90 100 V Relay, PLC 2-wire A90V IC circuit 100 V or less 1 Water

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Indicator light Load voltage Lead wire length (m) Applicable load Auto switch model Tie-rod mounting Band mounting Wiring (Output) Special function Type Electrical entry Pre-wired connector 1 (M) DC AC 0.5 (Nil) 3 (L) 5 (Z) M9N M9P M9B G39C K39C M9NW M9PW M9BW M9NA*1 G59 G5P K59 G39 K39 G59W G5PW K59W G5BA*1 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 24V 12 V 2-wire

Series

[Example] 10-SYJ3123-5M-M3 VJ3000-13-1 Rated voltage 5 port DC AC (50/60Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type "W", DC voltage is only available.

MLGP

Refer to How to Order for the standard model numbers. 1 to 349 20, 25, 32 -X Applicable stroke (mm) 5 to 345 40 to 80 25 to 345 100 20Part no.: MLGPM20-39-F A 1 mm spacer is installed in MLGPM20-40-F . Dimension C is 77 mm.

MIW/MIS

Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger options Nil: Basic type (Standard type) 1: Tapped on upper and lower faces 2: Tapped on all faces (5 surfaces including end surface) 12 12 1 A S D M9BW MIW Double finger type 32 50 1 A S D M9BW MIS Single finger type Made to Order For detailes, refer to page 1423.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

end flange Rubber bumper +0.6 0.4 50 to 200 mm/s 1.4 1.2 0.9 0.7 Non-rotating accuracy (Clamp part) Note 1) Note 1) Refer to Rotary Angle figure.

PF2x5.eng

Analogue output: 1 to 5 V Output impedance: 100 k Operator 1: Refer to the PF2A3 /PF2W3 or PF2A2 /PF2W2 operation manual for details of the flow monitors. 2: Load indicates analogue input equipment such as a voltmeter.

FILTER REGULATOR

No.IW02-OM0002-C PRODUCT NAME FILTER REGULATOR MODEL/ Series IW212 IW213 IW215 Contents Safety Instructions 2~3 1. Specifications 4 2. Construction and operation principle 5 3. How to order 6 4. Precautions for handling 7~8 5. Troubleshooting 9 6. Exploded View 10 7.

Siiiil"Tivrc

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Compact and

Description Material Note 1 Body PBT Caution 1. Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid. (Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)

Cylinder with Turntable ø63, ø80, ø100 Series MGT

Load voltage Auto switch model Lead wire length (m) 0.5 (Nil) Applicable load In-line Special function Type Electrical entry Wiring (Output) Pre-wired connector 5 (Z) 1 (M) 3 (L) AC DC M9N M9P M9B M9NW M9PW M9BW 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m