0.01

Clean Air Filter SFD Series RoHS Hollow Fiber Element HAA HAW Nominal filtration rating: 0.01 m (filtration efficiency 99.99%) AT IDF IDU Initial pressure drop: 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure: 1.0 MPa (at 20C) IDF FS IDFA IDFB SFD100 SFD200 SFD101/102 Made to Order Up to 100 L/min(ANR) Up to 500 L/min(ANR) Up to 100 L/min(ANR) IDH ID IDG IDK

Fieldbus system (CC-Link compliant)

QJ61BT11N Buffer memory address Remote input (RX) RX2F RX2C RX2B RX2A RX29 RX28 RX27 RX23 RX22 RX21 RX20 E2H Reserve (H) COM D COM C COM B COM A Reserve (L) Voltage decrease Reserve (L) RX3F RX3C RX3B RX3A RX39 RX38 RX37 RX33 RX32 RX31 RX30 E3H Reserve (L) Remote READY Error state flag Reserve (L) Reserve (L): Reserved bit (0 fixing), Reserve (H): Reserved bit (1 fixing) -25No.EX-OMI0001

Digital Flow Switch (Remote type monitor unit)

/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 NPN open collector output, PNP

PSxx-OMR0001CN

-G ISA3-H 1 m 1 m 1 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 3 m 3 m 3 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 5 m 5 m 5 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] -17No.PS-OMR0001CN-J 2 ON OUT 10090%0%() (0.1 mm0.09 mm0 mm) 1.5 F42.5 GH64 200 kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec

PSxx-OMT0001CN

GH64 200 kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E

Title not found

'. 1963 1649 gt17 , x ' 2803 5(n7 4536 7854 " 6 7147 1 N=0.1 02kgl 1 l\,4 Pa=l0.2kgf/cm, 1 M Pa=l45ps 1N=0.2251bs.

Air Cylinder MGQ Series Compact Guide Cylinder

G { f t ' 0.91 0.78 o.71 1.04 0.84 1.26 1.06 1.77 1.58 '1.22 1.01 Torque:T(N.m) 25 : 1 : t l l , 'illl I 1.53 1.3 1.16 1.O3 1.68 1.42 L : : , M 'al 1.96 2;t6 2.00 1.65 't.41 f,ll 3.92 2.94 2.45 1.96 32 _'-.' & 1.96 0.98 5.48 4.41 4.41 2.94 2.45 2.45 1.47 6.37 HEOI' 7.35 5.84 4.90 4.41 . | | G O L . 3.43 2.45 10.78 8.33 ic$ io|63 uG(xr 7.44 6.37 5.39 4.90 3.9 2.45 11.76 9.31 I ',i1 ,r: MGOiI

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Z (Example) A80CZ 3 m . L (Example) A80CL None .

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

OMS0020

How to order L E C C G 2 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 40 8.

3 Port Solenoid Valve SYJ300/500/700 Series

Common exhaust(pilot and main valve)type Pilot exhaust Not required Lubrication Free Mounting position 150/30 Impact / Vibration resistance m/s2 Dust proof Protection structure Base mounted type Solenoid Specifications Grommet (G), E(H), L type plug connector (L), M type plug connector (M) Electrical entry Coil rated voltage V DC 24, 12, 6, 5, 3 Internal pilot AC 50/60Hz 100, 110, 200, 220

Basic Type/Direct Mount Type

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked are produced upon receipt of order. Other than the applicable auto switches listed in How to Order, the other auto switches can be mounted. For detailed specifications, refer to page 1479.

Model Selection 1

M N P Q S V Note 1) B Brass/Copper H B Note 1) Stainless steel/Silver High corrosive spec., Oil-free Note 1) Non-leak, Oil-free H Steam (Max. 183C) Brass/Copper Non-leak, Oil-free B Note 1) L, M, V options are for non-lube treatment.

VQ7-6/7-8

end plate assembly Manifold block assembly U side end plate assembly < End plate assembly > AXT512 A AXT512 1A End plate position Cylinder port position Wiring specification L side R side L R L side R side L R Side Bottom A B P, R port size Rc1/2 Rc3/4 12 One-touch fitting 04 06 C12 Cylinder port size Rc3/8 Rc1/2 03 04 < Manifold block replacement parts> Part No

FSQ seies

l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

Air Cylinder RSQ Series Stopper Cylinder

N l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

Heavy Duty Stopper Cylinder Series RSH/RS1H

30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

MK

3 I = m a2 12 I = m2 2r 2 5 4.1-21