Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

VZS

Manifold solenoid valve: 32 stations (512 point) max. Maintenance and inspection are easy. With control unit Plug-in type/Non plug-in type Filter, regulation valve, pressure switch and air release valve all combine to form one unit. Piping processes are eliminated.

Modular F.R.L. Unit

AC40 AF40, AR40, AW40 AL40, AFM40, AFD40 AWM40, AWD40 36 36 32 AC40-06, AF40-06, AR40-06, AW40-06 AL40-06, AFM40-06, AFD40-06 E500-06 44 40 32 3/4 E600-06 E600-10 3/4 1 AC50, AC55, AC60, AC50B, AC55B, AC60B AF50, AR50, AL50, AF60, AR60, AL60 53 48 35 Notes) in model numbers indicates a thread type.

Clean Rodless Cylinder Series CYP

Provides high linearity and high precision. 1 Series CYP How to Order CYP 15 Z73 200 Clean rodless cylinder Cylinder bore size Number of auto switches 15 32 15mm 32mm 2 pcs. 1 pc. n pcs. Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X (10, 16) (10 to 32) (12 to 25) (32 to 100) (20 to 40) Clean room compatible Series 10-/11Achieves stable low speed operation even at 0.5mm/s (1mm/s for 16 bore size or smaller) Minimum operating pressure reduced (Low friction characteristics improved) Series CQ2X now includes four brand-new large bore sizes: 50, 63, 80, and 100.

MXW Series Long Stroke Slide Table

34 115 278 5 70 56 1 121 144 129 MXW8125 32 32 25 138 328 6 95 81 2 141 176 149 MXW8150 32 32 45 168 378 7 120 106 2 145 MXW Series Long Stroke Slide Table Dimensions MXW 12 Stroke: 50, 75 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 2.5 J 12 Scale: 30% 6.5 Width across flats 8 5H9 +0.03 depth 4.5 0 Operating port M5 x 0.8 Operation direction A 6-M4 x 0.7 thread depth

Air Pilot Operated Series NVSA

Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

OMU0023

Binary digit (decimal value) 0 to 50 ASCII hex "00" to "32" (d) Target position (encoder count value): This item is valid in Pulse Input Type control signal mode only. The target position data is sent as an encoder count value. Count value 1,000,000 has been fixed for 0 mm as a reference point.

EXxx-OMN0029CN

-3No.EX-OMN0029CN-D / 1 1.5 *3) *3)1 1 -4No.EX-OMN0029CN-D () () () () -5No.EX-OMN0029CN-D / () * UL UL1310 Class2 0V -6No.EX-OMN0029CN-D * IP67 / *() SI SI () ()SI SI * IP67 M12(M8) ( ) () -7No.EX-OMN0029CN-D CE * (20 ) PLC PLC * -8No.EX-OMN0029CN-D SI 1 SI 32 10 (SI ) U SI D SI ON/OFF PNP NPN PNP NPN PNP NPN EX600 D -9No.EX-OMN0029CN-D AD 16 10 16 10 DIN

EXxx-OMN0027CN

No.EX-OMN0027CN-D PROFIBUS DP SI // EX600-SPRA EX600-ED 2 8 9 11 13 13 15 SI 16 16 17 17 18 LED 22 24 25 26 27 29 29 31 32 42 43 52 52 63 GSD 63 63 SIEMENS PLC S7 64 67 69 70 78 -1No.EX-OMN0027CN-D [][][] (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

VNC

36 95 120 110 140 170 260 220 370 400 560 400 560 630 820 720 960 990 1500 1000 1600 0.3 0.2 7 3 8 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

Vacuum Equipment

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M3 ,M5 ,U10/32 R NPT Nil ASN N AQ Model 4 6 8 10 12 5/32"1/4" 5/16"3/8" 1/2" Applicable tubing O.D. (mm) Effective area (mm 2) IN OUT OUT EXH.

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

Bore size 32 to 63 M9BW MHS2 D 50 Made to Order Refer to page 545 for details. 2 fingers Number of fingers 2 Number of auto switches Nil S 2 pcs. 1 pc. Action Bore size Double acting D 32 40 50 63 32 mm 40 mm 50 mm 63 mm Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch size 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Caution Controlled flow 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Be sure to read this before handling the products.

AZ1000

seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) Max 300 psig (2.1MPa) for PTFE seat. 2) 14 to 194F (10 to 90C) for Vespel seat. 3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). 4) Tested with Helium gas inlet pressure 1000 psig (7 MPa). 5) Mass, including individual boxed weight, may vary depending on connections or options. 32

Process Valve

22 32 28 40 28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Plug-in Unit

DeviceNet/PROFIBUS-DP compatible SI unit As a DeviceNet/PROFIBUS-DP slave unit, this kit is capable of solenoid valve ON and OFF control up to 32 points. Furthermore, by connecting an input block, up to 32 sensor signal inputs are possible. Input block This expansion block connects to the SI unit and allows for sensor input to the auto switches.