0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P): 3/8, 1/2., 3/4, Tubing size (port A): 1/4, 3/8, 1/2, 3/4, MFLD BASE, REQ SHIKOMI/RSTRCTD, VALVE, FLUOROPOLYMER, 2.54320 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsTubing size (port P)Tubing size (port A)LLC4AStacking typeCommon IN/Individual OUT2 to 5 stations3/41

Oval pad with buffer , Lateral vacuum inlet direction , 12 pad sizes , Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 41 lb

AC Servo Motor Driver (Pulse input type/Positioning type)

. * In this configuration, the stroke end (LSP, LSN), forced stop (EM1) and servo-on (SON) signals will be ON automatically when the power is turned ON. 41 - 5.5.2 Initial I/O Signal Allocation (1) Position control mode (pulse input): The initial (Default) allocation of I/O signals is shown below.

RS2H-OM0045P

. -1516 D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

CEx-OMG0106

Reset MIN50msec Homing SetHome Man'l / Auto Start Man'l(+) Man'l(-) Pause (Output) Driving(+) Driving(-) Brake Origin Determined (1) Position Determined (1) Program END Error Cylinder Movement I N I T I A L I Origin Z E D POWER ON Note: Homing will be executed, only on RUN mode and during automatic executing. (1) Timing between stopping till output is a preseted timing, t1(preset data P7). 41

MRQB-OM0002

A80H IC 2 24V 12V A80C IC PLC A73C (2 ) A79W 0.5m () A73C 3m L () A73CL 5m Z () A73CZ N () A73CN 6-2. ,56mm ,0.5[Nm] BQ-2 1 6.1 24 6-3. 6.2 6.3 D-A7A8 D-F779 D-F779W 32 12 8 [mm] 40 11 6 7 32 [mm] 40 2 1 1 32 8.5(9) 9 9 A [mm] 40 11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46 27 32 10 4 [deg] 40 7 3 80100 24.5(25) 25 32 170190 32(32.5) 32.5 B [mm] 40 170190 41

JXCx-OMT0005CN

.85 Output 36Byte Byte12,13 Byte 12 1 *1 *2 1mm/s 2 13 Byte14,15 Byte 14 1 *1 *2 1mm/s 2 15 Byte16,17 Byte 16 *1 *2 1% 17 *1 *2 21(P.85 40 - Byte18,19 Byte 18 *1 *2 1% 19 Byte20,21 Byte 20 *1 *2 1mm/s 21 Byte22,23 Byte 22 *1 *2 1% 23 Byte24-271 Byte 24 1 -+ *2 0.01mm 25 26 27 Byte28-312 Byte 28 2 -+ *2 0.01mm 29 30 31 Byte32-35 Byte 32 *1 *2 0.01mm 33 34 36 *1 *2 21(P.85 41

JXCx-OMT0028CN

8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit code 3 (1-***) () Address.17 Address.16 code: 1148 00h 00h 15bit 8bit 7bit 0bit 16 =94h () 41

AUTO SWITCH, AUTO-SWITCH, 605, 41 lb

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.64696 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.64696 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.64696 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.67660 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.76516 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.67660 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, CA, AC MASS PRO 1/8 MODULAR (PT), 1.94557 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, CA, AC MASS PRO 1/8 MODULAR (PT), 1.98416 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DA, AC MASS PRO 1/4 MODULAR (PT), 1.65346 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41