ZPT/ZPX

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

CNS

Graph (1) 30 20 10 2.

76

The amount of moisture is 3.0 g/m3. 10.

4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

Ejector Valve Unit, Series ZYY/ZYX

Part No. of ejector valve for ZYY3000/ZYX3000 Number of ejectors 1 to 10 Ejector mounting position U D U side D side [Example: When individual wiring type model 45 for SY3000 is selected] ZZY Y3-45-04D-C6J1U 1SET SY3000 manifold model Ejector valve number Note 1) The combined total of solenoid valve and ejector valve stations is a maximum of 20 stations.

212

] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60] 6.6 [25] 0.00 0 0.1 [0.5] 0.3 [1] 0.4 [1.5] 0.5 [2] 0.8 [3] 0.9 [3.5] 1.1 [4] 1.2 [4.5] 1.3 [5] 0.7 [2.5] Flow rate gal/min [L/min] Flow rate gal/min [

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

10 1.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

45 17 36 82.6 2 x 3/4, 1, 1 1/4 (IN, OUT port) 95 Note) External pilot port (PA port) 1/4 is processed for threads in external pilot model only.

Series CE1

pulse) REA Power supply voltage 100V AC ( 20%), 50/60Hz 24V DC ( 10%) (Power ripple 10% or less) Between case and AC line: 1500V AC for 1min.

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

Refrigerated Air Dryer

Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

Digital Gap Checker

Hysteresis 0 to variable 7 Withstand pressure 600 kPa Detection nozzle 1.5 4 Current flow 5 L/min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 2 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Fd up to 1000 FY B up to 1000 CJ1 up to 1000 up to 1000 FX CJP FT FE FZ CJ2 CM2 Rear flange/(G) C85 Port Cushion valve 4-FD Rear flange (mm) CG1 Bore size (mm) Stroke range ZZ FZ FY FX FT FD B FY B MB 32 40 50 63 80 100 141 145 164 164 202 202 79 90 110 120 153 178 32 36 45 50 63 75 64 72 90 100 126 150 10 10 12 12 16 16 7 9 9 9 12 14 up to 500 up to 500 up to 600 up to 600 up to 750 up

VER2000/4000

6: VER4001 (Outer pilot) 14-9-21 6 Series VER2000/4000 Dimensions VER2000-: With sub-plate With flow control interface With B port regulator Hex. socket head cap screw M5 x 45 With SW (Max. 45) (Max. 45) (Cable: 6.8 to 9.6) Pressure gauge Interface regulator Flow control interface Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

End Lock Cylinder Series CBJ2

105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7 D-J79 D-C73C D-C80C D-H7C (16) D-F7V D-J79C (16) D-F7W D-J79W D-F7BAL D-F79F D-H7LF D-F7WV D-F7BAVL D-F7LF In addition to the models in the

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23