Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

PA3000/5000/PAX1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400

Heavy Duty Stopper Cylinder

300 300 200 200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-13 Series SY100 S41 Type Manifold: Side Ported/SS3Y1-S41Station -M3/M5 Grommet (G), (H) 11.5 P=10.5 (Pitch) 5 Manual override 5 G: 300 H: 600 28 (

Ejector Valve Unit Series ZYY/ZYX 1

(Length 300 mm) Without lead wires Without connector Misc.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155

ML1

switches S n 25 32 40 25mm 32mm 40mm 2 1 n Standard stroke Bore size (mm) Max. stroke (mm) Standard stroke* (mm) 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to

Tie-rod Type Hydraulic Cylinder

30 18 160 43 100 M16 x 2 M33 x 2 42 9 174 240 22 18 28 38 174 45 140 36 140 205 3/4 38 36 40 17 34 20 (mm) Without rod boot With rod boot Bore size (mm) S R T V W H ZZ e f h ZZ l 40 106 7.5 8 37 11 66 188 55 25 92 214 50 112 10 9 43 11 73 207 60 28 99 233 1/4 stroke 63 116 12 10 47 11 80 216 65 30 106 242 80 127 16 13 57 11 90 243 80 32 116 269 100 137 20 16 66 12 100 263 100 35 123 286

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for Wireless Base 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for Wireless Remote 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 Rated flow (l/min (ANR)) 750 1500 2200 3500 6000 12000 300 (1) Port size (Nominal size B) 1/8 ,1/4 ,3/8 1/4 ,3/8 ,1/2 3/8 ,1/2 ,3/4 1/2 ,3/4 ,1 3/4 , 1 1, 11/2 11/2 , 2 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.

AMG

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

Heavy Duty Stopper Cylinder Series RSH/RS1H

DC (+) Brown Main switch circuit OUT Black Auto Switch Weights Unit: g DC (s) Blue D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Model 0.5 11 11 11 Lead wire length m 3 54 54 54 D-Y7PW, Y7PWV 5 88 88 88 DC (+) Brown Main switch circuit Auto Switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw DC (s) Blue Indicator light 3.4 2.5 SMC SMC 6.2 5 D-Y7BW, Y7BWV 29 OUT (+) Brown Main switch