Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Multistage Ejector (N)ZL Series

Suction cover 1 9 PVF Sound absorbing material B ZL112-SP01 Front cover Without valve 2 10 PVF Sound absorbing material A (set no. for 9, 10 &11) End cover 3 11 PE Suction filter Body When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on pages 5 & 6. 4 Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent

α PneuAlpha HARDWARE MANUAL

Installation. 11 2. Hardware Specification. 3 1. Introduction. 1 3.1 DIN RAIL Mounting . 11 3.2 Termination at Screw Terminals . 11 3.3 Installation Mounting Notes. 12 2.1 Available Models. 3 2.2 Power Supply Specification . 4 2.3 Input Specification. 5 2.4 Output Specification. 7 2.5 General Specification. 8 iii PneuAlpha 4. Wiring . 13 6.

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

ZR

Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-11 11 Series ZR Ejector exhaust Ejector supply P port Vacuum pad connection V port Ejector Unit Nozzle Dia./1.0, 1.3, 1.5, 1.8, 2.0 mm Circuit diagram 2 2 Adapter B Silencer Ejector indication Nozzle dia./1.0, 1.3, 1.5 mm ZR1-W 1 10 13 15 2 Ejector 1 1 1 1 (Mounting hole) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Compact Type

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

Compact Type Dual-Rod Cylinder Series CXSJ

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

VQ4000

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Process Pump

SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4 MPa 100 SUP = 0.3

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type FZ Microspeed cylinder Bore size 20 25 32 40 Number of auto

JXCx-OMT0028CN

No.1 2 =0 39 - 11. 11.1 [IN] Bit/Byte / Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 0 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 1 4 AREA bit 0,1 5 WAREA bit 0,1 ID1 6 ESTOP bit 0,1 7 ALARM bit 0,1 2 H 3 4 0.01mm 2147483647 4 5 L 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 H 11 4 0.01mm

SMC Electronic Switch Series Variations

The EDPROM is rated to keep its memory for up to 100,000 hours (approx. 11 years) without having power supplied. Wiring Warning qAvoid close proximity to power or high voltage lines.

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17