XL-OMY0001 XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200
XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002
Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06
Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.
11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.
12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S)
DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.
operating pressure Ambient and fluid temperature 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700
operating pressure Ambient and fluid temperature 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700
FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 8 for details of the mounting nut.
mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical Data 1547 CY1F Series Precautions at Vertical Operation and Intermediate Stop Vertical Actuation 1.
Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.
sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143
) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2
-~-Micro-Mist Separator '-Made to order s ecifications" J Drain guide 1/48 female thread R IN OUT reversal 250 1/4 T Element service indicator 350 3/8 450 1/2 550 3/4 650 850 11/2 Thread B Bracket C N.C. auto drain(AMH150-550) o N.O. auto drain Rc (plj F GlPFl .. Refer to the table below for combination N NPT of accessories and optional specifications.
Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.
Figure 18-1 SMD Cover 49 - IN20267 Figure 18-2 Defualt Switch Position all up 50 - IN20267 Revision History Revision Description Date Author(s) 1.0 Initial release for Ethernet/IP MPC 010/11/2016 SMC US EPG SMC Corporation of America 10100 SMC Boulevard Noblesville, IN 46060 Phone: 1-800-SMC-SMC1 (1-800-762-7621) URL: www.smcusa.com 51 -
200mm/s 30mm/s 80mm/s Positioning repeatability :tO.05mm i0.03mm Type ot guide Linear guide Operating temperature range s to 4o"C (40-105"F) Pitch (Nm) Statlc moment allowance Boll (Nm) Yaw (Nm) 4 Construction Com 1 0 Stopper B Sensor plate Sofl steel Chrcmated 12 Co!
200mm/s 30mm/s 80mm/s Positioning repeatability :tO.05mm i0.03mm Type ot guide Linear guide Operating temperature range s to 4o"C (40-105"F) Pitch (Nm) Statlc moment allowance Boll (Nm) Yaw (Nm) 4 Construction Com 1 0 Stopper B Sensor plate Sofl steel Chrcmated 12 Co!
64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7