4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Model Position /No. of solenoid TYPe Port size (NPTR Cv factor Max.Ooerelino Response time (ms) Weight lbs (kst Plug-in Non Plug-in cycle CPM 2 position Single NVFF3l00 NVFR3110 Y1 300 30 or less 0.68 (0.31) 2.3 Double NVFB3200 NVFR3210 11 300 30 or less 0.90 (0.41) 2.3 Closed center NVFR3300 NVFRgtl0 k 1 . 9 180 50 or less 0.95 (0.43) 2.0 Exhaust center NVFF3400 NVFR3410 k 1 . 9 '180 50

-fl Seies

Model Position /No. of solenoid TYPe Port size (NPTR Cv factor Max.Ooerelino Response time (ms) Weight lbs (kst Plug-in Non Plug-in cycle CPM 2 position Single NVFF3l00 NVFR3110 Y1 300 30 or less 0.68 (0.31) 2.3 Double NVFB3200 NVFR3210 11 300 30 or less 0.90 (0.41) 2.3 Closed center NVFR3300 NVFRgtl0 k 1 . 9 180 50 or less 0.95 (0.43) 2.0 Exhaust center NVFF3400 NVFR3410 k 1 . 9 '180 50

Series CE1

, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

3 Position Cylinder Series RZQ

P2 = 1.5 x 0.5-0.024 x 15 = 0.39 MPa r Retraction The above values are for cases where the maximum payload found by the selection method is loaded. 0.2 0.1 100 200 300 Speed Adjustment Max. speed (mm/s) The data below illustrates the strokes controlled by the respective speed controllers. Gradually increase from a low speed to the desired speed setting.

Compact Type

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

IDX-OM-W011

M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i

1

ZZ Bore size ZZ Rc1/8 NPT1/8 20 10.5 11 7.5 54 (59.5) 75 (80.5) 20 60.5 (66) 25 10.5 11 7.5 52.5 (58) 76.5 (82) 25 59 (64.5) 32 10.5 10.5 7.5 53 (59) 77 (83) 32 59.5 (65.5) 40 10.5 10.5 7.5 57.5 (63.5) 87.5 (93.5) 40 64 (70) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 62 (67.5) 20 47.5 (53) 25 11 5 43.5 (49) 67.5 (73) 25 50 (55.5) 32 10.5 5 43.5 (49.5) 67.5 (73.5) 32 50 (56) 40 11

4-channel Flow Monitor ( compatible)

-segments, 7-segments for other) Sub display (right): 5 digits (partially 11-segments, 7-segments for other) Operation light LED is ON when switch output is ON (OUT1, OUT2: Orange) Digital filter 6 Variable from 0 to 30 s/0.01 s increments Enclosure IP65 (front side only when the panel is mounted), IP40 for others Withstand voltage 1000 VAC for 1 minute between terminals and housing Environment

4/5 Port Air Operated Valve Series SYJA3000 1

Refer to page 5-11-4.) Lubrication Not required Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) Note 1) In the case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

Pneumatic Transfer System Series MF

Nil S n Auto switch type 15 32 15mm 32mm Nil Without auto switch Refer to the table below for auto switch part numbers. Straight type Stroke Air supply unit Note 1) 200 250 300 350 400 450 500 600 1000 200mm 250mm 300mm 350mm 400mm 450mm 500mm 600mm 1000mm Qty.

Low Profile Guide Type

M2 Find the value of M2 max at 300 mm/s in Graph (2). m x g CY3B CY3R CY1S M1E = 1/3 x FE x L1 (FE = 1.4/100 x a x g x m) = 0.05 x a x m x L1 = 0.05 x 300 x 0.5 x 0.05 = 0.375 [Nm] 3A = M1E/M1E max = 0.375/1.07 = 0.350 3. Dynamic moment Investigate M1E. Find the collision speed . =1.4 x a =1.4 x 300 =420 [mm/s] L1 M1 CY1L a CY1H Find the value of ME1 max at 420 mm/s in Graph (1).

SL5200

Vespel is a registered trademark of DuPont. 29 Single Stage Regulator for Ultra High Purity Intermediate flow Series SL5800 For UHP gas delivery Inlet pressure: Max. 300 psig (2.1 MPa) Flow capacity to 200 slpm Body material: 316L SS secondary remelt Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL58 S M FV4 FV4 02 2PW Delivery pressure Bonnet option

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

AC Servo Motor Driver (SSCNET Type)

Configuration Minimum equipment and wiring requirements to get started Provided 1 Ex) 200 V AC (*1) by customer 5 6 Provided 1 by customer 7 2 3 (-) PC 1 2 (+) 8 4 C D 11 21 9 11 U 2 Electric Actuators Ex) LEF V W 3 Provided by customer 10 (Positioning unit/Motion controller) (*1)Refer to LECSS Operation Manual, Chapter 3 if the power supply voltage is 100VAC. 1 Driver LECSS*-S* 2 Motor cable

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

DOC1020530

After 1.6 s Blinking After 0.2 s When an alarm or warning also occurs during the test operation, the decimal point on the first digit will blink as follows. After 0.8 s After 0.8 s Blinking Blinking After 0.2 s (4) Start operation with the PC. -21- 5.2 JOG Mode JOG operation can be executed without host command.

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

3.5 7 RB0805 RB1006 RB1411 RB2015 Shock absorber model 5.5 11 0.98 3.92 14.7 58.8 Maximum energy absorption: (J) 5 10 Stroke absorption: (mm) 5 6 11 15 5.5 11 Collision speed: (m/s) 0.05 to 5 4.5 9 Max. operating frequency: (cycle/min) 80 70 45 25 Since the cylinder is in an intermediate stop condition when stroke adjustment is performed, use caution regarding the operating pressure and