HRX-OM-S004

Blue(DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black(Output1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue(DC COM) Brown (DC 24V) Brown(DC 24V) 14 Terminal No. Blue(DC COM) 6 Terminal No. Flow switch 13 Terminal No. 3 Terminal No. Black(Output1) Black (Output1) 11 Terminal No.

IDX-OM-W023

R 11 R 11-1 11-2 1 AC100V AC200V INOUT IDU8E15E1-10-R IDU15E1-20/23-R IDU8E/11E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W023 11 R AC100V M4 () AC200V (M3) 17 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W023 12.S 12 S 12-1 IDU8E15E1-10 IDU Series 12-1 IDX-OM-W023 12.S 12-2 L N PE M3 6.5mm 2 1.25mm

CG5-S

RR S U 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 9 83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Direct Operated Pilot Operated Refer to pages 7, 9, 11, 25, 35, and 39 for details. 2-Port Solenoid Valve Improved environmental resistance due to the stainless steel coil cover [IP67 enclosure] Refer to pages 46 to 50 for details.

Refrigerated Air Dryer

Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 ZFC F One-touch fitting (KQ2H1002AS) is not included.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

Rotary Actuator

Size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA CA CB Valve dimensions Key dimensionsNote) S SB SC SD SE S VH VJ VK VL b l 50 62 48 46 15 25 2.5 36 M8 x 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 9.5 7.5 39.5 4 21 8 5 0 0.030 25 63 76 60 57 17 30 2.5 41 M10 x 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 11 8 39.5 11 21 8 6

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

Cylinder with Lock Series MNB

W X Y ZZ J 32 34 27 1/8 154 6.5 7 30 198 3.2 32 57 50 6 M10 x 1.25 37 47 13 6.5 22 9 232 M6 x 1.0 40 39.5 27 1/4 161 8 9 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70 7 M18 x 1.5 47.5 58 20 10.5 27 11 279 M8 x 1.25 63 55.5 31.5 3/8 197 8.5 12 48 251 3.6 56 93 80 7 M18 x 1.5 55 58 23 12 27 14 296 M8 x 1.25 80 61.5 38 3/8 245

For post-stoppage positioning and locking

.) * Values for W-R1 Series Integration of the clamping unit and cylinder unit reduces design and assembly labor Cylinder Approx. 70 Clamp assembly 436 mm Selectable proximity switch for checking arm operation (Option) 250 mm Selectable when the mass of the transferred object is either 1000 kg or 3000 kg, with consideration given to the impact during positioning 15-E655 W-R1/W-R3 Series

AME

Accessory (Option) Applicable model Bracket assembly With cap bolt and spring washer AME150 AME250 AME350 AME450 AME550 AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

AT ID 1 Standard 11 2 Standard Accessory (Option) AMG Description Bracket Symbol Nil Rc Thread type Nil AFF B JIS Symbol F G N NPT N.C. auto-drain C AMG N.O. auto-drain D AM Refer to the table below for accessory/Option combinations. Port size Misc.

AMH

1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 J Drain guide B female thread R IN-OUT reversal direction Symbol Description Bracket T Element service indicator Nil B N.C. auto-drain C 1 Standard 11 2 Standard N.O. auto-drain D Note) Refer to How to Order Bowl Assembly on page 1420-59.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

MGZ Series

, 251 to 1000 mm Rubber bumper Cushion JIS class 2 Thread tolerance 1/4 1/4 1/4 Port size Standard strokes Bore size (mm) Standard strokes (mm) Long strokes (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Weight table kg (lb.)

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the