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m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Calculating motor speed conversion example using an actuator with a 20mm lead and 500[mm/sec] speed.

] [rEF] [Anr] 26 1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102

to 500 kPa 50 to 500 kPa A sensor may be unconnected or miswired.

12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.

Type Metric sizes 04 06 08 10 12 Inch sizes Universal 3 01 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 03 05 07 09 11 With One-touch fitting M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 01 02 03 04 U10/32 N01 N02 N03 N04 SMC Pneumatics, Inc. 11 Series ASIII1F-T Dimensions (mm) 1in=25.4mm Metric sizes L2 L3 Applicable tubing O.D. d D1 M1 L6 D2 L1 D4 L4 H (width

Calculating motor speed conversion example using an actuator with a 20mm lead and 500[mm/sec] speed.

The EDPROM is rated to keep its memory for up to 100,000 hours (approx. 11 years) without having power supplied. Wiring Warning qAvoid close proximity to power or high voltage lines.

Calculating motor speed conversion example using an actuator with a 20mm lead and 500[mm/sec] speed.

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Work piece weight: 5kg, Average speed: 2000mm/s) Note 5) The data above provide a guide for selection but is not guaranteed.

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Work piece weight: 5kg, Average speed: 2000mm/s) Note 5) The data above provide a guide for selection but is not guaranteed.

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Work piece weight: 5kg, Average speed: 2000mm/s) Note 5) The data above provide a guide for selection but is not guaranteed.

RR W XB XC Y Without switch cover With switch cover 50 45 45 5 40 46 88 20 20 46 48 78.4 134 136 92 132 63 55 45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.

TB 1 TB ID 1 1 CN4 2 CRC 3 func 4 ID 5 6 7 8 ID 119 - 9 FLASH 10 FLASH 11 1 CN4 11 2 3 4 120 - Ver1.** Ver2.** TB Ver.511 1TB Ver1.** TB Ver.511 11 TBsetting Language 12 TBsetting Language12 11 SET MENU TEST MONITOR DATA ALARM JOG SETTING SET AX IS. Setting 1 MENU Recconect Start Disp Easy Item Speed 1 Disp AX IS.

A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

Supply pressure [MPa] Flow Rate Characteristics Relief Characteristics Supply pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 1.0 0.9 0.9 0.8 0.8 Set pressure [MPa] Set pressure [MPa] 0.7 0.7 0.6 0.6 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0.0 0.0 0 500 1000 1500 2000 0 100 200 300 400 500 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 960 ITVH2000 Series 3.0 MPa Maximum Supply Pressure