Soft Start-up Valve AV2000/3000/4000/5000 1

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

COQ2BP

Foot , u Flange Clevis Moun~ 50 CQ-L050 CQ-F050 CQ0050 f~ ",,~~.~ 50 25, 30, 35, 40, 45, 50, 75, 100 ..63 CQ-L063 CQ-F063 CQ0063 63 25. 30. 35, 40, 45, 50, 75, 100 . 60 " CO-LOBO CO-FOeD CO-DOSO Notes. If foot bracket is required, order 2 pcsIcylinder.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.

SZ3000

21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle mark Triangle mark

reduces flow setting time

63.1 61.7 54.6 53.2 24.5 19.2 VCHC 45 AS331FS1-G03-08 8 13.2 38 23.5 52.2 14.2 46 AS331FS1-G03-10 10 15.9 17.4 23 42.2 28.1 50.3 15.6 47 AS331FS1-G03-12 12 18.5 43.5 28.3 52.2 17 49 AS431FS1-G04-10 10 1/2 27 15.9 17.4 18.8 25.6 47.9 26.1 61.2 64.1 62.5 55.1 53.5 15.6 26 19 80 AS431FS1-G04-12 12 18.5 21 26.2 49.8 28.3 63.4 17 82 10.4 12.9 16.6 20.2 36.6 21.4 50.1 13.3 ASR ASQ 3/8 21 55.4

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

63.1 61.7 54.6 53.2 24.5 19.2 VCHC 48 AS331FSG1-G03-08 8 13.2 38 23.5 52.2 14.2 49 AS331FSG1-G03-10 10 15.9 17.4 23 42.2 28.1 50.3 15.6 53 AS331FSG1-G03-12 12 18.5 43.5 28.3 52.2 17 54 AS431FSG1-G04-10 10 1/2 27 15.9 17.4 18.8 25.6 47.9 26.1 61.2 64.1 62.5 55.1 53.5 15.6 26 19 86 AS431FSG1-G04-12 12 18.5 21 26.2 49.8 28.3 63.4 17 90 10.4 12.9 16.6 20.2 36.6 21.4 50.1 13.3 ASR ASQ 3/8 21

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5

Applicable Auto Switch Model

D-C8 D-A5 D-A6 80 24 3 wire 3 wire 10 50 D-A59W 80 25 D-C73C D-C80C 14 53 40 162 50 166 D-B5 D-B6 22 78 Reed switch D-A3lC 63 184 Reed switch 80 D-B59W 20 210 76 100 D-A3 232 116 40 D-A4 160 114 50 164 D-A3lA D-A44A 110 D-A44C 63 182 2 wire 80 11 50 208 3 wire 100 D-H7 13 57 230 4 wire 2 wire D-J5 71 21 13 56 Solid state switch 2 wire 3 wire D-K5 81 23 18 68 D-F5 Solid state switch 3 wire

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

MB1

MK Standard part number MB1 XC6 Stroke ML + Adjustment 4 MH + Stroke + Adjustment Stainless steel piston rod and rod end nut ZZ + 2 strokes + Adjustment (A: 25, B: 50) Specifications Bore size (mm) 32 40 50 63 80 100 MA 21 27 32 32 36 46 MK 10 12 15 15 20 20 MI 24 32 38 38 45 55 MH 44 48 53 53 72 75 ML 18 20 21 21 32 32 MM 10 14 18 18 22 26 ZZ 175 183 205 205 258 261 Double acting single

CLQ

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

C76

Retract Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 66.7 56.3 66.7 40.7 66.7 14.7 66.7 19.6 66.7 18.1 66.7 19.6 32 10, 25 50, 100 150, 200 250 76.5 50 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 65.9 40 6-10-20 21 Series C76 Air Cylinder: Standard/Non-rotating Type Single Acting, Spring Return/Extended Weight Spring Return (g) Bore

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 60 + 45(n 2) 15 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

ZPT/ZPX

-B01-A18 112.5 163.5 125.5 176.5 50-B01-A18 50-B01-A18 50 51.9 35.7 54 24 35.5 50.5 72.5 147.5 198.5 16.5 80 83 58.4 85.1 37 48.5 63.5 85.5 160.5 211.5 27.5 75-B01-A18 75-B01-A18 183.5 234.5 196.5 247.5 ZPX HBJ-B01-A22 (Male thread) 100 125 Hexagon width across flats 17 M22 x 1.5 9.5 50 Hexagon width across flats 30 Width across flats 19 Rc 1/8 9.5 10 Hexagon width across flats 21 J Width

Thermo-chiller

) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56 L/min) Maximum ow rate 50/60 Hz 14.5 to 17.9 gal/min (55/68 L/min) Maximum pump head 164 ft (50 m) Minimum operating ow rate 50/60 Hz Note 7) 7.4 to 11.0 gal/min

ASR

31 57.7 10 155 178 17 36.5 65.6 6 158 181 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R1/4 21 24.8 92.2 72 55.8 50.8 25.6 49.8 44.8 19 149 172 21 32.6 61.7 10 151 174 22 34.4 63.5 12 20.9 165 188 17 36.5 65.6 6 168 191 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R3/8 21 24.8 93.8 73.6 57.4 52.4 25.6 51 46 20.2 159 182 21 32.6 61.7 10 161 184 22 34.4 63.5 12 20.9 292 310 21 32.6 74.8

SYJA3000

SYJ7000-21-1A 1 pc. 0.2 Caution Be Sure to read before handing.

High Vacuum Angle Valve

50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

JXCx-OMU0004

400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100 800 80 800 40 800 200 800 100 800 40 800 7 200 900 100 900 50 900 300 900 200 900 50 900 8 300 1000 200 1000 75 1000 500 1000 300 1000 75 1000 9 400 1200 300 1200 100 1200 600 1200 400 1200 100 1200 10 500 1400 400 1400 125 1400 700