Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

10

Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole DIN terminal Conduit terminal D G1/2 S Q F Cable 6 to 12 34 D Q2 F (44) 31.5 32 25 R T E C R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 A B B1 C D

3-Position Rotary Table

12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

ZQ-OM01301

ZQ-OM01301-A Revision history A P.22 Change of the spare part numbers for the solenoid valve P.24 Change of the spare part numbers for the V port fitting P.25 Change of the spare part numbers for the Washer assembly P.27 P.28 Added items to 8.

Electric Rotary Table

Basic type 0.57 1.2 2.6 High precision type 0.63 1.4 2.8 20 28 42 Step motor (Servo/24 VDC) Motor size Motor type Encoder Incremental A/B phase (800 pulse/rotation) 24 VDC 10% Power supply [V] Power consumption [W] Note 5) 11 22 34 Standby power consumption when operating [W] Note 6) Max. instantaneous power consumption [W] Note 7) 7 12 13 14 42 57 Table Rotation Angle Range External stopper

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

Series IDG

Note 1) Symbol P is for M type only. This is not applicable to the V type since it is equipped with a relief type regulator, 100 Note 2) This is not applicable in case of thread type symbols N and F, because barrel nipples are used for equipment connections.

Compact Cylinder with Lock Series CLQ

V,12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) IC circuit A96V A96 5 V A72 A72H Grommet 200V 100V Reed switch A93V A90V A93 A90 12 V IC circuit 100 V or less Relay, PLC 5 V,12 V 12 V 2-wire A73C A80C A79W 24 V Connector IC circuit 24 V or less 5 V,12 V Diagnostic indication (2-color indication) Grommet Solid state auto switches

KJ

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

SMC

Feature 4 Guide Table P.94 Air Slide Table P.98 Air Slide Table P.106 Model Size MXP MXPJ6 Model Size MXQ 13226, 8, 12, 16, 20, 25 Model Size 10-MGF 1122112240, 63, 100 6, 10, 12, 16 6 Magnetically Coupled Rodless Cylinder P.158 Air Slide Table P.132 Clean Rodless Cylinder P.153 Model Size CYP Model Size MXS 13226, 8, 12, 16, 20, 25 Model Size 12-CY1B 12-CY3B 6, 10, 50, 63 15, 32 15, 20,

SMC Pneumatic Clean Series

With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.

Air Slide Table/Long Stroke Type Series MXY

V (mm/S) Graph (1) Confirm that V = 420 and W = 0.2 do not exceed the values in Graph (1).

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

Round Type Hydraulic Cylinder

Solid state auto switch Connector IC circuit 3-wire (NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay PLC Yes 24 V 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V 3-wire (PNP) 2-wire Grommet 3-wire (NPN) IC circuit Water resistant (2-color indicator) 5 V, 12 V M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 12 V 5 V, 12 V 5 V H7NF A96 A93 A90 B54 B64 C73C

CG1

Bore size (mm) MM W TC NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 35.5 44 55 69 80 100 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22

Rotary Gripper Series MRHQ

"#$ " %# &'# D t D D t t c c e c e e u u u s s s d d d i i i Rotary Gripper g g g o o o n n n r r r P P P A A A 9 9 9 MRHQ 10/16/20/25 w w w 9 9 m 9 I m I 1 1 n 9 9 9 9 n 9 9 d u d u r u a a a r u 9 o 9 9 s o s F tr F ie tr ie r r r 1 1 1 Modular construction D r D r d d d e e e e v v s s o o i i n g n g n n n n a a H H n P n P g g r r Gripper section is unitized for simple replacement.

1.63

12 V Solid state auto switch Reed auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V,12 V Relay, PLC Grommet Yes 24 V 12 V 5 V,12 V Water-resistant (2-color indicator) IC circuit 12 V Magnetic field resistant (2-color indicator) 2-wire (Non-polar) 3-wire (NPN equivalent) A96V A96 5 V IC circuit Yes Grommet A93V2 A90V A93 A90 100 V Relay, PLC 2-wire 12 V 24 V 100

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

CYP

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) C 5.4 8.6 A 8 12 B 9.5 14 E 4H9 6H9 ED 9.5 13 EK 4 6 F 12.5 25

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22