Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: NPTF, Option: Side Bracket

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: NPTF, Option: Side Bracket

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: Grommet Lead Wire 0.6m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor w/Light Non-polar, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: NPTF, Option: Side Bracket

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: DIN Connector w/o Connector, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: NPTF, Option: Side Bracket

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: WAO [M8 Connector w/o Connector (IEC60947-5-2)], Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: NPTF, Option: Side

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-PositionExhaust Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 1/8, Connecting Tube Diameter

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-PositionExhaust Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 1/8, Connecting Tube Diameter:

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-PositionExhaust Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 1/8, Connecting Tube Diameter: -, Driving Type

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-PositionExhaust Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 1/8, Connecting Tube Diameter:

SMC has improved product performance and reliability with the redesigned SY series valve. The SY3000 and SY5000 have the same valve width as their predecessors, but the flow has been increased by up to 80%, allowing the valve size to be reduced. A built-in strainer in the pilot valve prevents trouble caused by foreign matter. By using H-NBR seal material for the main valve and seals, Ozone

CLQ

32 9 221 351 326 63 158 53 32 18 288 523 498 80 261 120 49 31 638 998 959 100 380 175 116 56 1009 1307 1251 Bore size (mm) Magnet Threads Nut Rod end male threads With rubber cushion Foot type (includes mounting bolt) Front flange type (includes mounting bolt) Rear flange type (includes mounting bolt) Double clevis type (includes pin, snap ring, bolt, and flat washer) 76 111 145 190 373

SX

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

VM

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Free Mount Cylinder for Vacuum Series ZCUK

33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5 38. 5 47. 5 51. 5 ZH 76. 5 54. 5 67. 5 63. 5 72. 5 DQ HQ HP 43 35 67 27 42 74 53 53 36 68 34 47 79 43 28 38 70 43 22 23 32 64 28 32 64 35 ZPT-B10 ZC(D)UKC32 ZC(D)UKQ32 ZU 32. 5 45. 5 41. 5 50. 5 54. 5 64. 5 77. 5 73. 5 82. 5 86. 5 ZL Rod end shape: Pad direct mounting ZY Tubing bore

Compact Cylinder with Lock Series CLQ

32 9 221 351 326 158 53 32 18 288 523 498 64 26 17 3 137 174 159 45 12 8 3 174 149 140 Magnet Thread Nut Rod end male thread With rubber bumper Foot style (Including mounting bolt) Rod side flange style (Including mounting bolt) Head side flange style (Including mounting bolt) Double clevis style (Including pin, snap ring, bolt and flat washer) 518 1064 1839 373 111 145 190 76 When auto

V

22.5 12.5 24 17.5 15 50 15.5 14.4 12.8 8.5 ZFB100-06 6 ZFB200-06 6 MM size 52 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 15.2 9.5 ZFB200-08 8 ZFB300-08 8 57 30 69.5 27 14.5 29.5 21 17 65 21.5 18 18.5 11 ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5

2/3 Port Valve

Symbol Solenoid Specifications OUT Apparent power VA Inrush Holding Power consumption W (Holding) Temp rise C (Rated voltage) 7.5 60 6 50 8 60 11 65 9.5 60 11.5 65 Model Power supply Frequency Hz 50 60(53) 18 60 51(44) 12 50 80 21 60 67 17 IN AC VXZ22 DC AC VXZ23 DC Note) O The return voltage is 20% or more of the rated voltage for AC and 2% or more for DC.

ZR

Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

ZU

53 53 53 40 40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14 0 0.1 0.2 0.3 0.4 0.5 0.6 0 5 10 15 20 25 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow rate N (l/min(ANR)) Supply pressure (MPa) Supply pressure (MPa) Suction flow rate N (l/min(ANR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector vacuum pressure and suction

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table