5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch

E-P HYREG ® Series VY1 1

VY1A00 1, VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply (P to A) valve of valve y and the exhaust (A to R) valve close due to the balance between actuating forces F1 and F2.

E-P HYREG ® Series VY1

VY1A00 1, VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply (P to A) valve of valve y and the exhaust (A to R) valve close due to the balance between actuating forces F1 and F2.

E-P HYREG

VEX SRH VY1A00 1 , VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply [1(P) to 2(A)] valve of valve y and the exhaust [2(A) to 3(R)] valve close due to the balance between actuating forces F1 and F2.

HRX-OM-R016

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure

HRX-OM-O021

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [

HRX-OM-R005

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [

JXCx-OMU0026

(Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode. Acceleration 1 to Max ACC/DEC in the basic parameters Set the deceleration from travel speed to stop. (Unit:mm/s2) Refer to (1) to (5) on page 53 for deceleration speed setting for movement mode.

LEC-OM034xx

Electric actuators/Common precautions .49 15.1 Design and selection .49 15.2 Mounting.50 15.3 Handling.51 15.4 Operating environment .52 2 - 15.5 Maintenance .53 15.6 Precautions for actuator with lock.53 16.

JXCx-OMT0002

JXC-OMT0002-C Description Input range Explanation Stroke (-) to Stroke (+) in the basic parameters Set the target position (Unit: mm) Refer to (1) to (5) on page 53 for position setting for movement mode. Position Set the acceleration to reach to travel speed. (Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode.

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Guide Cylinder/Compact Type Series MGC

32 135 35 60 80 50 32 75, 100, 125, 150 200, 250, 300 MGT 125 107 19 16 160 176 110 125 9 12 85 165 M8 37 160 40 70 95 60 38 150 142 25 19 190 210 115 135 11 12 95 200 M10 42 194 45 82.5 115 75 50 Bore size (mm) P Note 2) Q R S T U V W WH X Y Z O 20 25 32 40 50 86 80 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 M6 x 1 1/8 21 12 38 16 112 53

21

53 77 114.5 125 Use a thin wrench when tightening the piston rod.

0.4

D E Note) DIN rail mounting style Direct mounting style Option Nil 02 to 16 (1) B (2) K (3) N R S None DIN rail length specified Back pressure check valve Note) Refer to page 53 for details.

Vacuum Pad

Suction flow rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Vacuum Pad

Suction flow rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5