3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Left Right VAC. port Common EXH port 2-Rc 1/2, 3/4 (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 4 76 1.5 88 1.5 104 1.5 5 92 1.5 104 1.5 120 1.5 6 108 2.0 120 2.0 136 2.0 7 124 2.0 136 2.0 152 2.0 8 140 2.0 152 2.0 168 2.0 9 156 2.0 168 2.0 184 2.0 10 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 172 2.0 184 2.0 200 2.0 L2 L3 13-4-15 15 Series ZM Manifold

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 Common SUP. port Common pilot EXH. port 2-M5 x 0.8 Rc 1/8 Individual SUP. port Left Right VAC. port 2-Rc 1/2, 3/4 Common EXH. port (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 4 76 1.5

The specialty regulator series VBA is a booster regulator that saves money and energy by increasing the main line pressure up to two times. The booster regulator, when connected to air supply line, increases pressure up to two times and the main air supply pressure may be set low. Desired pressure increase can be easily adjusted. Boosts local line pressure without requiring additional power

/ 284 mm Height: 6.95 in / 177 mm , Length: 14.3 in / 363 mm, Width: 11.2 in / 284 mm, Height: 6.95 in / 177 mm, Net Weight: 56 lbs. / 25.4 Kg Series Configured Datasheet.

, Length: 14.3 in / 363 mm, Width: 11.2 in / 284 mm, Height: 6.95 in / 177 mm, Net Weight: 56 lbs. / 25.4 Kg Internal Code: G3029013 Billing Code: 3HCA7 Series Configured Datasheet.

Speed Controller with Indicator

16.4 30.1 21.5 39.7 14.2 16 AS231FS1-G02-04 4 13.2 24 17.5 35.7 43.8 42.4 38.3 36.9 13.3 20 15 7.2 9.6 12 1/8 13 26 AS231FS1-G02-06 6 10.4 19 33.8 21.4 43.9 28 AS231FS1-G02-08 8 13.2 34.9 23.5 46 14.2 29 AS231FS1-G02-10 10 15.9 20.9 38.1 24.7 47.3 15.6 32 AS331FS1-G02-06 6 8.2 16.5 29.9 17.5 40.1 49.7 48.3 43.2 41.8 13.3 21.5 16.2 1/4 17 12.9 13 55 AS331FS1-G02-08 8 13.2 38 23.5 59.9 14.2 56

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

23 63 18.5 19 12.9 20.6 AS331FG-03-08 AS331FG-N02-11 28.2 49.1 56.2 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 59 16.2 69 23 21 46.5 41.5 23 R 3/8 19 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 53.5 46.1 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 16.2 12.9 20.6 23 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 46.5 41.5 40.2 35.2 34.4 55.3 49.1 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 23 59 18.5 19 AS431FG

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

59 12.8 45 17 7.4 16.5 11.4 52.2 6.2 34.9 3/16" 35 60 64.4 15.2 45.8 18 8.2 15.5 7.2 1.2 17 13.2 54.4 7.1 35.7 1/4" 33 20.6 9.8 1.2 64 71.6 18.5 47.3 21 9.8 18 15.2 59.8 8.1 36.7 5/16" 36 68 76 20.9 48.5 22 11 17 13.2 59 7.4 45.2 1/4" 56 121 77.7 18.5 55.4 21 20.6 9.8 1.2 18 5/16" 15.2 64.4 8.2 46 60 27.6 12.4 11.3 1.2 125 20.9 56.4 22 82.1 3/8" 17.9 70.8 9.5 47.2 21 72 AS4001F-11D 3/8"

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

18.5 42.5 28.3 64.7 17 34 AS33l1F-U03-06A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 1/4 19 50 48.4 43.6 42 AK 13.3 31 AS33l1F-U03-08A 8 13.2 37.1 23.5 52.2 14.2 AS33l1F-U03-10A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 32 AS33l1F-U03-12A 12 18.5 42.5 28.3 57 17 34 AS43l1F-U04-10A 10 1/2 24 15.9 17.4 18.8 25.6 46.4 26.1 61.2 50.8 49.2 42.2 40.6 15.6 54 AS43l1F-U04-12A 12 18.5 21 26.2 48.3 28.3 63.4 17 56

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

18.5 63 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 21 69 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 17 56 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 18.5 59 23 19 AS431FG-04-10

Speed Controller: Standard Type In-line Type AS Series

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

C76

101 to 150 st 151 to 200 st 151 to 200 st 7 12 7.5 12.5 1 to 50 st 8 (33) 13 (38) 32 40 32 40 138 138.5 83 88 83.5 88.5 58 63 58.5 63.5 108 113 108.5 113.5 D-C7/C80 D-C73C/C80C NCA D-J79C 8.5 (33.5) D-A73 D-A80 13.5 (38.5) DD-A72/A7H/A80H D-A73C/A80C D-F7/F7W D-J79/J79W D-F7WV D-J79C D-F7BAL, D-F79F 32 84 59 9 (34) 8 109 -X 40 139 89 64 14 (39) 13 114 2032 40 32 40 136 81 86 82 87 56

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and

Rotary Actuator

For details, refer to pages 191 to 195. 80 12.5 24 44 M16 x 2 100 14.5 30 56 M20 x 2.5 205 CVRA1 Series Construction/With Solenoid Valve Without air cushion !7 !4 !3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Possible to transfer a workpiece at low-speed.

A S 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BU H Size Rotation angle 10 15 90, 180 29 12 18 42.4 (8.5) 8.5 17 6.7 2.2 16.7 5 90, 180 31 14 20 53.6 (9.5) 9 26.4 10.6 23.1 6 DW Q S US UW ab M TA TC TD Rotation angle Size 90 56 10 4.5 17 35 44 6 9 15.5 8 15.4 180 69 90 65 15 5.5 20 40 50 7 10 16 9 17.6 180 82 The AU dimension is not the

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

Coolant Valve

Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56

3

75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5

1

XSA2-43S 64.5 31 3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread