2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported

MXS

3 wire (PNP) P.5.3-39 V V Solid state switch F9BV F9B 2 wire V V Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire (NPN) V V Diagnostic indication (2 color) F9PWV F9PW P.5.3-66 3 wire (PNP) V V F9BWV F9BW 2 wire V V PLC: Programmable Logic Controller Note 1) Lead wire length 0.5m (Ex.)

Hydraulic Filters

Suction filter with case EM820-*1*2 EM530-*1*2 2 104 x l177 EM920-*1*2 EM630-*1*2 2 1/2 132 x l212 EM030-*1*2 EM730-*1*2 3 132 x l212 EM130-*1*2 EM830-*1*2 3 1/2, 4 155 x l193 EM220-*1*2 1/2, 3/4, 1 69 x l88 FHG (Refer to P. 11.) Suction guard EM320-*1*2 1 1/4, 1 1/2, 2 89 x l123 EM420-*1*2 2 1/2, 3 109 x l188 EM040-*1*2 3/8, 1/2 53.1 x l90 FH34 FH44 FH54 FH64 (Refer to P. 15.)

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

Membrane Air Dryer

With drain guide F A B C D Model L E IDG302 307 162 91 28 Series IDGV) IDG602 OUT SMC SMC P (A) C L (B) P Port size 3/8, 1/2 Q M 8 54 (D) Purge air for K dew point indicator J 37 H G N IN OUT 54 8.5 (F) 10.5

Compact Hydraulic Cylinder

M9NW M9PW M9BW M9NA1 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PA1 M9PAV1 3-wire (PNP) 2-wire 4-wire M9BA1 M9BAV1 12 V 5 V, 12 V F79F IC circuit Diagnostic output (2-color indicator) A96V A72 A93V2 A96 A72H A93 A90 Relay PLC IC circuit

Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Relay, PLC 12 V Yes Yes 24 V (B54) B54 100 V, 200 V 2-wire C73C 12 V Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 K79 K79C 3-wire (NPN) H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 5 V, 12 V IC circuit Grommet 3-wire (PNP) 12 V 2-wire Connector 3-wire (NPN) G59W G5PW K59W 5 V, 12 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V 3-wire

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

, pin.4) RY(n+2).6 Digital output 2 (CN2, pin.4) RX(n+2).7 Digital input 7 (CN3, pin.4) RY(n+2).7 Digital output 3 (CN3, pin.4) Unit No.1 EX600-GILB RX(n+2).8 IO-Link Port 1 event flag RY(n+2).8 RX(n+2).9 IO-Link Port 2 event flag RY(n+2).9 RX(n+2).A IO-Link Port 3 event flag RX(n+2).A RX(n+2).B IO-Link Port 4 event flag RY(n+2).B Reserve RX(n+2).C RY(n+2).C RX(n+2).D RY(n+2).D Reserve RX

Compact Type

-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .

SYJ300/500/700

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Bernoulli Gripper

VP Resin ZNCM PS 2 Stopper 20 V V V 30 V V V 40 V V 60 V V V 80 V V V VS Stainless steel Material Stopper size PN NBR (Black) PS Silicone rubber (White) Symbol Body size 1 20, 30 2 40, 60, 80 Table 2. Size 20 Piping (Refer to page 16 for details on how to mount the product.)

Guide Cylinder/Compact Type Series MGC

Yes Relay, PLC 3-wire (NPN) 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) IC circuit 4-wire (NPN) 5 V, 12 V 3-wire (NPN equivalent) A96 5 V A93 A90 100 V Grommet IC circuit 100 V or less None B54 B64 (B54) (B64) 100 V, 200 V Yes Relay, PLC 12 V

Cylinder with Turntable Series MGT

, D-Y7NW(V), D-Y7PW(V), D-Y7BW(V), D-Y7BAL Reed D-Z73, D-Z76, D-Z80 Solid state D-Y59 , D-Y69 , D-Y7P(V), D-Y7NW(V), D-Y7PW(V), D-Y7BW(V), D-Y7BAL Reed D-Z73, D-Z76, D-Z80 A B A B A B A B How to Mount and Move the Auto Switch How to Mount and Move the Auto Switch Flat head watchmakers screwdriver Auto switch mounting screw (M2.5 x 4 l) Accessory Auto switch mounting

Mechanically Jointed Rodless Cylinder Series MY1

2-wire 12 V [] [] 3-wire (NPN equivalent) A96 Z76 5 V IC circuit A93 A90 Z73 Z80 Grommet 100 V Relay PLC 2-wire 12 V 24 V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

MHZ

F9NW Y7PW F9PW Y7BW F9BW Standard Standard Standard Standard Standard Standard Standard Standard Standard 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.

MHZ

F9NW Y7PW F9PW Y7BW F9BW Standard Standard Standard Standard Standard Standard Standard Standard Standard 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.

Series CE1

(PNP) v F9N F9NV 12V F7P F7PV IC 5V,12V Grommet v F9P F9PV J79 F7BV v 12V F9B F9BV 2 wire J79C F7NWV Connector V v v v v v v v v V F9NW F9NWV Relay PLC 3 wire (NPN) 24V F79W F7PW Yes 5V,12V IC Diagnostic indication (2 color) 3 wire (PNP) F9PW F9BW F9BA F9PWV F9BWV J79W F7BA F7NT F79F F7BWV 12V Grommet 2 wire Water resistant (2 color) With timer Diagnostic indication (2 color) 3 wire (NPN

High Vacuum Angle Valve, XL Series

P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3