Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

5 Port Air Operated Valve Series VFA3000 1

2 position double 3 position closed center 3 position exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

Pressure setting trimmer 1 Pressure setting trimmer 1 Pressure setting trimmer 2 79.8 600 (3000) 3 . 72 600 (3000) ZSE ISE 1 2 + ZSP PS 40 30 40 Pressure supply port 2 O-ring Pressure supply port 2 O-ring ISA 6 5 . 9 6 5 . 9 30 PSE 21 21 IS 27 27 2 x M2.5 x 24L Mounting threads 2 x M2.5 x 24L Mounting threads ISG ZSM Grommet type: SE1-14/-15/-18/-19 01 T1 01 T1 Connector type: SE1-14C/-15C

ZSE1/ISE1

PF2 27 27 IF 2-M2.5 x 24L Mounting threads 2-M2.5 x 24L Mounting threads Data Connector type: SE1-14C/-15C/-18C/-19C Grommet type: SE1-14/-15/-18/-19 01 T1 01 T1 I Z I Z Pressure setting trimmer Hysteresis setting trimmer Hysteresis setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01

AR20-B to AR60-B

Description Material Model Color Zinc die-cast AR10-A 1 Body White Aluminum die-cast AR20(K)-B to AR60(K)-B AR20K-B to AR60K-B (Regulator with Backflow Function) AR10-A Polyacetal White AR20(K)-B to AR40(K)-B 2 Bonnet A-A Aluminum die-cast AR50(K)-B/ AR60(K)-B y A Replacement Parts [AR10-A] 2 OUT 1 I N No. Description Material Part no.

Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

AS-FPQ/AS-FPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

        Series VKF300

VK300-82-2-01 VK300-82-2-02 VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 1578

AS-FPQ/AS-FPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

LEC-OM071xx

Install the program using the following procedure. 2-3 2 P a n e l D i s p l a y a n d SigmaWin+TM 1. Please download the install program from our home page. 2. "SETUP.EXE" of the file is double-clicked. A message will appear, welcoming you to the SigmaWin+ program. 3. Click Next to continue.s 2-4 2 P a n e l D i s p l a y a n d SigmaWin+TM 4.

30

Note 2) Value of FEP tube. D Different Diameter Tee: KQB2T 2 x Applicable tube a Applicable tube O.D.

Ozone Resistant

Evaluation: Cracking detection using a magnified 50x metallurgical microscope 2 2 Basic Structure and Ozone Resistance Ozone resistance of NBR and HNBR varies depending on its structure.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS2200-01 AS1200-M5 Made to Order Refer to page 647 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

90

BLEED 2 x 1/8 Pressure gauge port 141 43 91.7 76.1 65.3 22 48.1 EXH OUT IN 2 x 1/4 to 1/2 Port size 2 x 1/2 Port size 66 With digital pressure switch: IR30l1 2-0llEl-A 76 48 72.5 53 16 M12 x 1 Mounting hole 2.3 M28 x 1.5 BLEED 30 141 91.7 76.1 65.3 22 48.1 2 x 1/8 Pressure gauge port EXH OUT IN 66 2 x 1/2 Port size 2 x 1/4 to 1/2 Port size 804 IR1000-A/2000-A/3000-A Series Specific Product

IZx-OMV0005

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

2/3 Port Valve for Various

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5