Body Size: 60, Type: B (Regulator Type), Pipe Thread: N (NPT), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: E (Push-turn Locking Type, Manual), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 60, Type: B (Regulator Type), Pipe Thread: N (NPT), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: E (Push-turn Locking Type, Manual), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 60, Type: B (Regulator Type), Pipe Thread: N (NPT), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: E (Push-turn Locking Type, Manual), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 60, Type: B (Regulator Type), Pipe Thread: N (NPT), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 60, Type: B (Regulator Type), Pipe Thread: N (NPT), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: E (Push-turn Locking Type, Manual), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator

Table of Contents

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Body Size: 60, Type: B (Regulator Type), Pipe Thread: N (NPT), Port Size: 10 (1), Normally Open, Closed: D (N.O., Normally Open, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94 124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN

CP95

) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

Possible to transfer a workpiece at low-speed.

CRB2 Counter-clockwise A port Positioning pin hole 5 Adjustment bolt A CRB1 (For counter-clockwise rotation end adjustment) 22 95 .5 e MSU ng Adjustment bolt B ra t (For clockwise rotation end adjustment) en CRJ tm se wi us ck dj a lo CRA1 -c nd B port er se Clockwise e nt wi on Cl ck u lo o oc C ad ti CRQ2 C ta 90 k ju ro wi st 1 se m r ge en ot With Adjustment Bolt at t r an io n an

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e Allowable Lateral Load to the Piston Rod End gl 10 n a e nt gl e an m st t en u dj m a m st u ju m i in ad M Using friction fittings makes it easier to mount the load to the piston rod end.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise A port 5 Adjustment bolt A 5 22 9 (For counterclockwise rotation end adjustment) .5 e g nt ran Adjustment bolt B (For clockwise rotation end adjustment) e m e st s wi ju ck ad o d cl en B port er Clockwise nt on u 0 Cl o ti ta C ad o se With adjust bolt, internal shock absorber 19 ck ro wi ju wi k c st ge lo s C m e Adjustment angle per rotation of

C95

CN SR (max) R 32 14 34 3.3 3 5 22 10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN

CP95

) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN

Fieldbus System

Features 4 Fieldbus System Series EX600 RoHS How to Order S EX600 SI Unit Version Protocol Symbol Description PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note 1) Symbol Description When MJ or EN or EC is selected When PR or DN is selected PR DN MJ EN EC Nil A EtherCAT Note 1) Output type Symbol Description PNP (Negative common) NPN (Positive common) 1 2 DX EX600 Digital Input Unit Input type