15

+ Y2) CY1SG6-Z RJ0604N M4 x 0.7 M3 0.5 25 25 49 52 16 1 7.5 15 42 10 14 M6 x 0.75 46 11.5 7.5 19 66 15 CY1SG10-Z RJ0806HN M8 x 1 M4 x 0.7 M5 0.8 25 38 61 60 24 1 5.5 11 47 12.5 16.5 58 14 10 24 76 24 CY1SG15-Z RJ0806LN M8 x 1 M4 x 0.7 M5 0.8 30 50 76 75 30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10

7

14 120 52 113 82 52.5 ( ): Denotes the Normally Open (N.O.) dimensions. 154 Pilot Operated 2 Port Solenoid Valve VXD Series High temperature oil Heated water Replacement Parts DIN Connector Part No.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

240

6 10 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 11 Motor plate Aluminum alloy Anodized 12 Guide ring Aluminum alloy Size 10 only 13 Bearing 14 Bushing Oil impregnated sintered copper alloy 15 Soft wiper r w !5 !4 !3 e u !

Environment

Note 14) For an actuator with lock, add the power consumption for the lock.

Wireless System

A B A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Be careful not to squeeze it in the wrong direction, as problems such as pin damage may occur. 300 mm V100-49-1-1 500 mm 1000 mm 2000 mm 5000 mm V100-49-1-2 V100-49-1-3 V100-49-1-4 V100-49-1-7 22 33.9 14 646 Series 10-SYJ300/500/700 Specific Product Precautions 7 Be sure to read this before handling.

Modular Type Lubricators Series AL

AL800 AL900 AL800 AL900 12316 123156 12314PA 123413A-1(12) 123413A-2(14) 123417A(12) 123416A(14) 123128PA 124232A 123321-1A 123321-4A 12318 123111 113136 KA00466 123032A 123058 C4SL C4SL-2 C4SL-3 C4SL-6 C4LL-8 800147AP 800147A-S1P 800147A-S2P Standard -6 Aluminum casted Aluminum die-casted Aluminum die-casted Body Housing Platinum silver painted Platinum silver painted 1 2 Polycarbonate Nylon

Series CE1

20 18 36 10 57.5 71.5 65.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 83.5 78 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 215.7 71 94 91 91 97 9 16.2 11 46 177.4 95 9 9 80 92 60 203 238 14 224 20 30 22 44 14 89.5 219.2 84.5 109.5 113 107 108 * Dimensions for auto switch model D-F79W. 4.4-13 3 Point Preset

LC6D/LC6C

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

MLGP

200 200 200 44 60 70 11 14 14 13 9 14 118 146 158 7.5 9 9 24 24 28 86 110 124 106 130 142 48 48 52 72 92 110 300 300 300 40 50 63 M8 x 1.25 M8 x 1.25 21.5 130 M10 x 1.5 M10 x 1.5 28 130 M10 x 1.5 M10 x 1.5 WB Bore size (mm) X XA XB YY YL Z XC XL st25 25

MLGP

200 200 200 44 60 70 11 14 14 13 9 14 118 146 158 7.5 9 9 24 24 28 86 110 124 106 130 142 48 48 52 72 92 110 300 300 300 40 50 63 M8 x 1.25 M8 x 1.25 21.5 130 M10 x 1.5 M10 x 1.5 28 130 M10 x 1.5 M10 x 1.5 WB Bore size (mm) X XA XB YY YL Z XC XL st25 25

3 Port Air Operated Valve Series SYJA300 1

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

14 J.S.T.

VHK

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 Bore size (mm) CX

Escapements Series MIW/MIS

Note 2) Refer to page 14 for lead wire length.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

14 100 44 16 12 44 54 120 M6 34 52 6.5 14 4 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11 7.5 1/8 13 38 30 104 44 118 86 106 40 M8 x 1.25 M8 x 1.25 21.5 32 32 46 22 8.6 14 9 1/4 9 47 40

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

14 Power cable b View b View a a Wiring Cable description Color Signal description Pin no.