SYJ300-OMU0003

(DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V S DC5V G 300m R DC3V H 600m 1 AC100V50/60Hz )V111 CE L -Q 2 AC200V50/60Hz LN L AC110V50/60Hz LO 3 (AC115V50/60Hz) M 4 AC220V50/60Hz MN M (AC230V50/60Hz) MO *WDC *CE DC WO M8 1 W *M8 P13P14 *P13P14 5 D V115 5 DC24V 6 DC12V S () 1 AC100V50/60Hz Z () *DOZYOZ *AC S 2 AC200V50/60Hz 3 AC110V50/60Hz (AC115V50

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

None Nil ASV120F/E220F Type With seal S ASV310F/410F/510F 1 2 Tee Elbow Note) Applicable tubing O.D. Metric size Flame resistant resin body as standard.

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

F/ISE

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

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DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatics Finland Oy FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Ipari Automatizlsi Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S POLAND SMC Industrial Automation Polska Sp.z.o.o. ROMANIA SMC Romania s.r.l. RUSSIA SMC Pneumatik LLC.

Title not found

Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

KR

Note 2) Suffix S to the part number, if w/ seal is desired.

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

HEC-OM-S008

0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

ZSE30/ISE30

Blue DC() -26 Analog output type 1 to 5V (2.5% F .S.) Output impedance: 1k Bring the pressure back to atmospheric pressure and try using the zero out function. Residual pressure error Brown DC(+) Black OUT (Analog output) + 12 to 24VDC Load Blue DC() Supply pressure exceeds the maximum regulating pressure. -28 Analog output type 4 to 20mA (2.5% F .S.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04

SMC

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.