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Note 4) When ordering the body only, select the symbol from to respectively. 2020 PVQ Specifications VEF VEP Rated pressure range Display/Set pressure range Withstand pressure Display/Minimum setting unit Applicable fluid Power supply voltage Current consumption Switch output 0 to 1 MPa 0.1 to 1 MPa 1.5 MPa 0.01 MPa (Air, Non-corrosive gas, Non-flammable gas) 12 to 24 VDC 10%, Ripple (p-p

Note 4) When ordering the body only, select the symbol from to respectively. 2020 ITVX Specifications PVQ Rated pressure range Display/Set pressure range Withstand pressure Display/Minimum setting unit Applicable fluid Power supply voltage Current consumption Switch output 0 to 1 MPa 0.1 to 1 MPa 1.5 MPa 0.01 MPa (Air, Non-corrosive gas, Non-flammable gas) 12 to 24 VDC 10%, Ripple (p-p)

From the View menu bar "parameter (A)" please click on the "parameter setting (P)". "Parameter Settings" screen will be displayed. Please click on Read". 6.3.3 Parameter setting method Please set the parameters for each actuator. Refer to "LECSS Operation Manual,chapter 5 for details of each parameter.

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

upon the application Bearing type Slide bearing Ball bushing bearing MGQM MGQL Model Bore size (mm) 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Action Double acting Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa MX 12, 16 0.12 MPa Min. operating pressure 20 to 100 0.1 MPa MTS Ambient and fluid temperature 10 to 60C (No freezing) MY 50 to 500 mm/s 12 to 63 Piston speed 50 to 400

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)72?2?1275Non-magnetizing lock1107.924 VDC 0 10%

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)72?2?1275Non-magnetizing lock1107.924 VDC 0 10%

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)72?2?1275Non-magnetizing lock1107.924 VDC 0 10%

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)72?2?1275Non-magnetizing lock1107.924 VDC 0 10%

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)72?2?1275Non-magnetizing lock1107.924 VDC 0 10%