MVGQ Standard stroke (mm) Positions/No. of solenoid Effective area (mm2) (Cv factor) 10 Applicable valve series Bore size (mm) 12 16 20 25 32 40 50 63 80 100 20 25 30 40 50 75 125 150 175 200 100 -X 2 position Single SYJ3000 P. 10-16-4 1.2 (0.067) 20Double Single Double VZ3000 2 position 4.5 (0.25) Data P. 10-16-8 Single VZ5000 12.5 (0.7) 2 position Double Single Double VF3000 2 position 16
0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !
center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No
10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions
Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance
Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 1Ry 5mA Servo ON 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS N-OT
(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order
: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.
(Refer to About TEMP READY function (P.527) for TEMP READY function.) Display [ ] if the circulating fluid discharge pressure has reached the pressure limit value. (Refer to About control function of circulating fluid discharge pressure (P.5-32) for details of PRESS LIMIT.) Ready / P.
V MM NA P S RR TF TH TT TV TW TX TY TZ Z ZZ -X Up to 300 80 100 M22 x 1.5 M26 x 1.5 80 100 Rc1/4 Rc3/8 104 105 18 22 11 13.5 55 65 11 12 110 130 72 93 85 100 45 60 64 72 Up to 300 26 32 183 192 241.5 268.5 IY-G08 IY-G10 Technical Data Use a thin wrench when tightening the piston rod. Refer to the dimensions of the basic type for the female rod end type and the long male rod end type.
Mounting position Base mounted type 150/ 30 Impact / Vibration resistance m/s2 Dust proof Protection structure Internal pilot Solenoid Specifications SYJ712 4 SYJ72 2 4 Grommet (G), (H), L type plug connector (L), M type plug connector (M) Electrical entry A A 24, 12, 6, 5, 3 Coil rated voltage V DC 100, 110, 200, 220 AC 50/60Hz P R P R 10% rated voltage Allowable voltage 0.5 (With light
p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101
KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.
Basic weight 0.40 kg (Foot style 20) Additional stroke weight 0.06 kg/50 ST Air cylinder stroke 100 ST Additional air cushion weight 0.02 kg 0.40 + 0.06 x 100/50 + 0.02 = 0.54 kg (Foot style 20, 100 stroke) 10-14-11 12 Series CG5-S Construction With rubber bumper 80, 100 80, 100 t e t q o i r y !
Basic weight 0.40 kg (Foot style 20) Additional stroke weight 0.06 kg/50 ST Air cylinder stroke 100 ST Additional air cushion weight 0.02 kg 0.40 + 0.06 x 100/50 + 0.02 = 0.54 kg (Foot style 20, 100 stroke) 10-14-11 12 Series CG5-S Construction With rubber bumper 80, 100 80, 100 t e t q o i r y !
P.5-12 (15) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (16) Operation mode P.5-12 Common or serial communication ( mode). (17) Operating condition display It indicates the run and stop status of the product. P.5-12 (18) Run/Stop To run/stop the product.
(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47
CE1 CE2 Stroke Stroke Speed ML2B Space-saving has been realized by simple circuit Comparison to Shockless Transfer Systems C J G5-S Time Time Stroke CV P = 0.5 MPa, M = 100 N P = 0.3 MPa, M = 100 N M = 100 N M = 300 N V = 300 mm/s V = 100 mm/s Sine Cylinder Cushioning keep up with depth of orifice as sine function which change depend on stroke.
Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold
+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.