Profi-E

D i agnosi s( D I AG ) Byt e 7 0 0 0 0 0 0 b0 b7 I nt ernal di agnost i c error 0: N o error 1: Error O ver range error 0: N o error 1: Error N ot e : Al t hough 100% F. S. f or t arget val ue i s 12bi t , com m uni cat i on i s avai l abl e up t o 150% F. S. ( accuracy i s guarant eed up t o 100% F. S. ) . O ver range error i s out put w hen 150% F. S. i s exceeded.

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

42

: Double, 3-position/With light (For B side) E: Single, Double, 3-position/ Without light (A/B side common) V118-A B E V118-A B E 4 Pilot valve assembly 4 Pilot valve assembly Coil type Coil type Nil Standard (0.95 W) Y Low wattage type (0.4 W) Nil Standard (0.95 W) Y Low wattage type (0.4 W) 528 Construction VQ5000 Series Plug Lead Unit Metal seal type Rubber seal type e q w q w e SV SYJ

RB/RBL/RBQ

Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

VCC

M4 x 16 Round head combination screw Tightening torque: 1.2 0.2 Nm y w Note) e Note) r Note) e Note) t r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

Modular Type Filter Regulator Series AW

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

CNG

0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0.1 C 0.1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200

CNG

BC PH MM H1 PD E 0 0.05 E 0 0.05 I BZ TH Width across flats B1 Width across flats KA Width across flats NA 8-J TT TY TW C0. 1 TX TE +0.10 0 4-TF TV TZ BC Z ZZ + Stroke f 8 l e h + l ZZ + l + Stroke Z + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL

Cylinder with Lock Series CNG

BC PH MM H1 PD E 0 0.05 E 0 0.05 I BZ TH Width across flats B1 Width across flats KA Width across flats NA 8-J TT TY TW C0. 1 TX TE +0.10 0 4-TF TV TZ BC Z ZZ + Stroke f 8 l e h + l ZZ + l + Stroke Z + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

High Vacuum L Type Valve

C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

VSA4

E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

Swivels

Performance Data S Series Swivel (1/4", 3/8", 1/2", 3/4") Test Fluid: Oil 150 SUS vs. Pressure Drop 40 35 3/8" Features 3/4" 1/2" 30 3000 psi working pressure rating for all sizes. D Swivels Pressure Drop in PSID Variety of seal options. 25 Torque value does not significantly increase with pressure.

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

SFOD-OMT0009CN

(0-149) D RESET SVON <> <> (0-901) E <> (0-902) E <> <> <> (0-910) E <> SDRAM SDRAM (0-911) E <> 87 No.SFOD-OMT0009CN-B code <> FROM FROM (0-912) E <> <> Modbus (CI 1 2 CI 3 4)OFF <> Modbus (0-913) E <> (0-914) E <> 88 No.SFOD-OMT0009CN-B (2) code <> , [] (1) (2) =0 (3) (4) (5) (6) (7) (1-048) B RESET <> <> [] (1) -+ (2) (1-049) B <> RESET <> + JOG <> + (1-052