CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

Modular Type Filter Regulator Series AW

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

Electromagnetic Digital Flow Switch

C O NTE NTS 3-Color Display Electromagnetic Digital Flow Switch LFE Series How to Order p. 3 Specifications (Integrated Display Type) p. 4 Specifications (Remote Type Sensor Unit) p. 5 Flow Rate Characteristics (Pressure Loss) p. 6 Internal Circuits and Wiring Examples p. 7 Parts Description p. 8 Fluid Passage Structure p. 8 Dimensions p. 9 3-Color Display Digital Flow Monitor LFE0 Series

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

•

Center trunnion: CS2WT z+ 1 '2 stroke Width across ilats KA 2, P G -! P IRe ,NPT , G) ...,.,l\ With rod boot Width across flats KA , I J I ~ G M ~1<;lL, 1~ '-~ {~ ~~j I" OJ > -~ I ~ ~ rI< I AL ~ ~ " I 0 c ~ c .s.!! ~ H S + Stroke Ji.'.

VXA21/22

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14

Vacuum System Peripherals:

PSE200 PSE201 Model NPN open collector PNP open collector Output specifications 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polariry protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.) Current consumption [Power supply voltage] 1.5 V 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.)

CNG

P-86.5 (JT)

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Cylinder with Lock Series CNG

mounting range GB A F K BN Rc(PT) P TB AL 2-TDe8 (pin O.D.)

VQ

Refer to p.2.9-15 for How to Order for DIN rail.

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 8 5 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 11 6 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 14 7.5 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 MB MB1 CA2 Rod Clevis GKM (ISO 8140)

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

HEC_W-E

Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

P R DC 24V, 12V 24V, 12V Coil rated voltage AC 50/60 Hz (inrush) 110V 110V A DC 3.1W, 0.3W Note3) (Holding) 1.5W Power consumption AC 1.45VA P R Plug-in, L/M type connector (With indicator light and surge voltage suppressor) Electrical entry Latching type specification Note 1) Consult P/A for available combinations. Grommet type entry is N/A with any of these options.

VCA

How to find the flow rate for air/ Flow rate formulas based on the air temperature of 20C For subsonic range where P + 0.1013 < 1.89 (P + 0.1013) Q = 226S P(P + 0.1013) For sonic range where P + 0.1013 1.89 (P + 0.1013) Q = 113S (P + 0.1013) Q : Flow rate [l/min(ANR)] S : Effective area (mm) P : Pressure drop P P (MPa) P: Upstream pressure (MPa) P: Downstream pressure (MPa) How to make

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Note) If there are more than 4 stations, supply air from both P ports and exhaust from both R ports.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15