ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

222 266 354 L1 L2 L3 244 288 75 87.5 337.5 362.5 400 112.5 137.5 162.5 175 200 225 250 287.5 375 262.5 312.5 85.5 98 410.5 How to Order 348 373 123 148 173 185.5 210.5 235.5 260.5 298 385.5 273 323 Double check block 2 position 3 position/exhaust center R1 R1 R1 R1 VQ2000FPG 01 01 F R2 R2 R2 R2 Option IN side port size OUT side port size None With bracket DIN rail mounted (for

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog output/3 rotation setting Nil S High noise reduction type Standard type E19 1 point setting/analog output/200 degrees setting M21 M15 1 point setting/without analog output

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50 200 150 r25 100 z .z =:v7z. -4i -2 .44 -.4 5000 4m0 40 30 m 2500 2000 1500 12.5 1 0 ===-rt=='-t {E -.2-_L-2. d r / .zx. :2. 4 6 (mm) Fig.6.14 Theortical Force of pneumatic cylinders, trom 2.5 to 30 mm (left and top scales) and from 32 to 300 mm (right and bottom scales) for 19,.1-a"ng,5 bg!.

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p 1o 12 stalons Lateral Plug.in Style Manifold series VQCI 000/20044000 r t Fast response times and long service life VQCl100: 10 ms 2 ms; 200 million cycles VQC2100: 20 ms 2 ms; 200 million cycles VQC4100: 17 ms 3 ms; 100 million cycles ( ( I T CE compliment " , t 4-position dual 3-pod valves for independent control of A & B ports Availabe conf igurations IN.C.A.C.], lN.O /N.O l, and [N.c

Heavy Duty Stopper Cylinder

200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

JIS Standard Hydraulic Cylinder

V 200 V or less 3-wire (NPN equiv.) 5 V Yes Grommet Relay PLC No Yes No A54 A64 A59W 12 V 2-wire 24 V A33 A34 A44 Terminal conduit PLC Relay PLC Yes 100 V, 200 V Grommet DIN terminal Diagnostic indication (2-color indicator) B59W 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

SMC Pneumatic Clean Series

mm/s 0.5 to 200 mm/s 8 M8 x 1.25 14 M14 x 1.5 8 M8 x 1.25 14 M14 x 1.5 10 12 10 12 M10 x 1.25 M10 x 1.25 JIS Class 2 +1.4 0 mm 1/4 1/4 1/8 1/8 Vacuum suction port, Relief port Grease Particle generation grade M5 x 0.8 Fluorine grease Grade 2 Grade 1 2 l/min (ANR) Suction flow rate (Reference values) External dimensions and applicable auto switches are the same as 10-/11-CM2.

Rotary Actuator/Vane Type

A parallel key is used instead of chamfer for size 40. +4 0 = Max. = 110 e g n a r End of rotation n +4 0 = Max. = 200 o i t e g a n a t r o n R o i End of rotation t a t o R (90) DChamfer (Start of rotation) Start of rotation is the position of the chamfer (key) when B port is pressurized.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

S Without connection port (For manifold) 00 Electrical entry Rated voltage 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz CE-compliant G Grommet, Lead wire length 200 mm C Conduit D DIN terminal T Conduit terminal Terminal with indicator light TL DLDIN terminal with indicator light Note1) CE-compliant: Electorical entry

CRB2/CRBU2/CRB1

A parallel keyway is used instead of chamfer for size 40. +5 0 +5 0 +4 0 = Max. = 200 +4 0 = Max. = 110 End of rotation e g e n g a n r a r n n o o i t i a t a t End of rotation o t o R R Chamfer (Start of rotation) Chamfer (Start of rotation) (90) (45) A port B port A port B port Start of rotation is the position of the chamfer (keyway) when B port is pressurized.

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

RZQ

Caution 5 150 100 200 300 1.

ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

Vacuum Filter AFJ Series

drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No

Compact Manifold Regulator

0 50 100 150 200 250 300 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Enable Ignores inrush current. 3 Inrush current filter Unit Disable Does not ignore inrush current. 0.1 ms Sets the time to ignore the input signal change. 1.0 ms 4 Input filtering time Selects the time for filtering. 1.0 ms Unit 10 ms 20 ms 1.0ms Input extension time Sets the time to hold the input signal. 15 ms Selects the time to hold the input signal. 15 ms Unit 5 100 ms 200 ms Enable