Large blow and

E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5 92 47 2.3 42 Rc3/8 76 500 250 310 Note 1) This thread portion is intended to adjust the product characteristics.

ML1

, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

•

(cm2) (mm) (mm) direction 3 4 i 5 6 12.57 j37.7 50.3 62.8 75.4 OUT 40 20 1 140.2: 168.2 28.0 84.1 112.1 37.7 47.2 56.6 IN 9 .43 1283 19.63 58.9 78.5 98.2 117.8 OUT 50 20 49.5 16.49 66.0 IN 82.5 199.0 124.7 155.9 !

Precision Regulator

Modular adapter IR-X170 ARJ AR425 to 935 ARX AMR ARM Applicable modular size IR1000 series: 20 type IR2000 series: 30 type IR3000 series: 40 type ARP IR-A 1 The Made-to-Order product (IR-X170) is the product number with a modular adapter attached to the standard product.

PSxx-OMG0005CN

(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S.

IR1000/2000/3000

IRM 10 3 G Copper-free Specifications 2 Set pressure and quantity External and internal copper parts are changed to stainless steel or aluminum. 0.2MPa setting 1 to n pcs. 0.4MPa setting 1 to n pcs. 0.8MPa setting 1 to n pcs. 0 1 2 Standard part number 20 Note) Contact SMC if equipped with pressure gauge.

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

HEC_W-E

Cooling capacity W 2000 Fluid: Water 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-5 Cooling capacity of HEC012 2) Heating capacity Radiating Water Temp.20 oC Radiating Water flowrate10L/min 3000 2500 Heating capacity W Fluid: Water 2000 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-

Multistage Ejector (N)ZL Series

20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Modular Type Regulator Series AR

Description AR10, 20 AR25 to 40 (-60) AR50, 60 Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Aluminum die-cast Polyacetal 1 2 Replacement parts Part no. No.

AMF

2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

VQ5000

3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

q"s

mA. 0 to 20 mA (Sink tvoe) Voltage type 0 to 5 VDC. 0 to l0 VDC Presel inDut 4 ooints Current type 250 o or less Voltage type AoDrox. 6.5 kQ Presel inpul ADotox.2.7 ket Straight type Right angle type Inpul impedance H Analog output 1 lo 5 VDC (Load impedance: 1 kQ or more) 4 to 20 mA (Sink type) {Load impedance: 250 o or less) Output signal (rnonitor output) JIS Symbol Switch output NPN

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

VCA

S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

Air Cylinder

) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size NA S TA TB ZZ Bore size TC TD TE TF TG 20 24 69 (77) 11 11 106 (114) 25 29 69 (77) 11 11 111 (119) 32 35.5 71 (79) 11 10 (11) 113 (121) 40 44 78 (87) 12 10 (12) 130 (139) 50 55 90 (102) 13 12 (13) 150

F

~60OC = 4~140F Operating Temperature -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 POLYURETHANE TUBING SERIES TU, TIUB H O W T O O R D E R P O LY U R E T H A N E T U B I N G S E R I E S TU & TIUB Soft and very flexible tubing TU 20

Large Bore Compact Cylinder Series CQ2

30 40 50 75 100 125 150 175 200 250 300 Reed switches: D-Z7, Z8 Solid state switches: D-Y5, Y6, Y7 Female threads Male threads 180 Single rod Double acting CQ2 200 Double rod New 180 and 200 Compact cylinder variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2