Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

20 stations 20 R Port Rc (PT)1/4 Note) If there are more than 6 stations in type 20 or more than 9 stations in 21 type, supply air to both sides of "P" port and exhaust air from both sides of "R" port.

90

are used 200 200 When 20 units are used 77% reduction Current model IR3000 Series 91% reduction 38000 yen reduction 150 150 117000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1000-A Series IR2000-A Series IR3000-A Series 50 50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Pin description 1 DC(+) PF2W740 2 OUT2 3 DC() 120 60 1.6 17 67 6 4 OUT1 FLOW SWITCH U P 34 55 S E T 60 50 34 OUT1 OUT2 DOWN FOR WATER 34 2-Port size 4-4.5 50 40 (42.2) 73 34 Flow direction 20 Series PF2W Dimensions: Integrated Display Type for Water PF2W711 148 77 80 79 32 9 2 U P FLOW SWITCH SET 70 58 88 46 45 OUT1 OUT2 DOWN 2-Port size 45 4-5.5 36 (42.2) 60 46 Flow direction 21 Digital

Series VCL

Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CL2 49 20 24.5 28 4.5 38 17.3 34.5 58 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CL3 57 25.5 28.5 30 5.5 42 19.3 38.5 68 24 55 45.5 53 48 60 51 68 101 86.5 VV2CL4 57 25.5 28.5 30 5.5 42 20.8 41.5 76 26 62.5 47.5 60.5 50 62 58.5 70 103 94 6 Direct Operated 2 Port for

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

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For a special order length, add sutfix "U" to end of part number. *. Not available at time ol catalog printing. Consult factory for avaitability. fttnlfibftilmm'solM 1/8', 5t32 311d' 114" 5/16' o o o c o o o 1 5 milbFffiHFmW 22 4 1 9 1 9 20 20 1 8 Plpe Reduclng Thrad Sizo Plp ThFad SEe 20 20 21 18 17 't7 | ."

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

Vacuum Pad: Ball Joint Type

Connection 10 40, 50 20 to 32 10 to 16 10 13 13 B5 M5 x 0.8 16 16 B8 M8 x 1.25 Female thread 20 20 B01 Rc 1/8 25 25 N01 NPT 1/8 32 32 T01 NPTF 1/8 40 40 50 50 Material N NBR S Silicone rubber Pad type U Urethane rubber F Ball joint type F FKM GN Conductive NBR GS Conductive silicone rubber Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CY1 MY1 3.4-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto switch Without auto

Digital Flow Switches Series PF2A

B F Accumulated pulse output Brown 1 Load ON OFF OUT1 Main circuit Main circuit 4 Black Analog output White A 50 msec 2 + 24 VDC Load DOWN MODE SET U P 3 Blue C 2-G 60 Load is an analog input equipment such as a voltmeter, ammeter.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

CLA

16 182 23 C .'0.,' 2 5e ~ ; 58 290 296 52 11.2 66 114 298 304 80 37 y, 55 15 23 70 20 208 29 0 <u, 10. 0 ", 71 327 347 65 12.5 80 Slro!

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Electric actuators / Common precautions 19 9.1 Design and selection 19 9.2 Mounting 20 9.3 Precautions for Use 20 9.4 Operating environment 21 9.5 Maintenance 22 9.6 Precautions for electric actuator with lock 23 10.

CM2

5 5 24 M20 X 1.5 18 8 28 12 15.5 8 M8 X 1.25 20 15 12 13 20 8 41 20 1 to 300 17 6 5.5 30 M26 X 1.5 22 10 33.5 12 19.5 8 M10 X 1.25 22 15 12 13 25 8 45 26 34.5 1 to 300 17 6 5.5 M26 X 1.5 22 12 37.5 15 19.5 10 M10 X 1.25 27 15 20 13 32 8 45 26 21.5 42.5 1 to 300 22 8 7 M32 X 2 24 14 46.5 15 21 10 M14 X 1.5 33 20 16 40 11 50 32 With rod boot h Symbol Bore S U Z ZZ P 1/8 1/8 1/8 1/4 RR Stroke

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.